Stocchi Matteo, Mencarelli Davide, Pierantoni Luca, Göritz Alexander, Kaynak Canan Baristiran, Wietstruck Matthias, Kaynak Mehmet
IHP Microelectronics, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
Universitá Politecnica delle Marche, Ancona, 60131, Italy.
Sci Rep. 2019 Jul 31;9(1):11078. doi: 10.1038/s41598-019-47472-2.
The investigation of the thermal properties of an array of microbolometers has been carried out by mean of two independent numerical analysis, respectively the Direct-Simulation Monte Carlo (DSMC) and the classic diffusive approach of the Fourier's equation. In particular, the thermal dissipation of a hot membrane placed in a low-pressure cavity has been studied for different values of the temperature of the hot body and for different values of the pressure of the environment. The results for the heat flux derived from the two approaches have then been compared and discussed.
通过两种独立的数值分析方法，即直接模拟蒙特卡罗法（DSMC）和傅里叶方程的经典扩散方法，对微测辐射热计阵列的热特性进行了研究。具体而言，研究了置于低压腔中的热膜在热体不同温度值和环境不同压力值下的热耗散情况。然后对两种方法得出的热通量结果进行了比较和讨论。
