Cho Young-Soo, Jang Gun-Eik
Department of Information Display, Hongik University, Seoul, 121-791, South Korea.
J Nanosci Nanotechnol. 2020 Jan 1;20(1):594-598. doi: 10.1166/jnn.2020.17255.
We fabricated transparent Mn (2.59 wt.%)-doped tin oxide (MTO)/Ag/MTO films with refractive index-matching layers (IMLs) on a polyethylene terephthalate (PET) substrate. To reduce refractive index-mismatching, polydimethylsiloxane (PDMS) and MTO layers were inserted between the MTO/Ag/MTO multilayer film and the PET substrate. MTO and Ag were deposited by RF/DC magnetron sputtering at room temperature, whereas spin-coating was used to deposit PDMS at various dilution ratios in hexane. In this study, pattern visibility was examined by comparing the differences in the color and reflectance of oxide/metal/oxide multilayers before and after adding the PDMS and MTO IMLs. In addition, the effects of the PDMS dilution ratio on the electrical and optical characteristics were also investigated. The MTO/Ag/MTO/PDMS/MTO multilayer films showed high transmittance (>86% at 550 nm) except at the dilution ratio of 1:50. As the PDMS dilution ratio increased from 1:50 to 1:200, the reflectance difference (Δ) increased from 0.08% to 0.35% and the color difference (Δ*) increased from 0.31 to 1.23. The maximum resistance changes of the multilayer films were 0.126% and 0.124% after outer and inner bending, respectively, for 10,000 cycles with a radius of curvature of 4 mm.
我们在聚对苯二甲酸乙二酯（PET）基板上制备了具有折射率匹配层（IML）的透明锰（2.59重量%）掺杂氧化锡（MTO）/银/MTO薄膜。为了减少折射率不匹配，在MTO/银/MTO多层膜和PET基板之间插入了聚二甲基硅氧烷（PDMS）层和MTO层。MTO和银在室温下通过射频/直流磁控溅射沉积，而PDMS则通过旋涂法以不同的己烷稀释比例进行沉积。在本研究中，通过比较添加PDMS和MTO IML前后氧化物/金属/氧化物多层膜的颜色和反射率差异来检查图案可见性。此外，还研究了PDMS稀释比例对电学和光学特性的影响。除了1:50的稀释比例外，MTO/银/MTO/PDMS/MTO多层膜显示出高透过率（在550nm处>86%）。随着PDMS稀释比例从1:50增加到1:200，反射率差异（Δ）从0.08%增加到0.35%，色差（Δ*）从0.31增加到1.23。对于曲率半径为4mm的10,000次循环，多层膜在外弯曲和内弯曲后的最大电阻变化分别为0.126%和0.124%。
