Mena Gómez Josue, Carvajal Joan J, Bilousov Oleksandr, Díaz Francesc, Aguiló Magdalena
Universitat Rovira i Virgili, Departament Química Física i Inorgànica, Física i Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA) - EMaS, Campus Sescelades, E-43007, Tarragona, Spain.
Sci Rep. 2019 Aug 12;9(1):11686. doi: 10.1038/s41598-019-48202-4.
We optimized the deposition conditions of polycrystalline nanoporousGaN coatings produced by Chemical Vapor Deposition on Si substrates, by exploring the effect produced by the Ga holder shape, the initial amount of Ga, the reaction deposition time and the metallic catalyst used. Such polycrystalline films probed to act as antireflective coatings by reducing the reflectance of Si substrates by 50% or more, and that of flat GaN samples by 40% in the UV and 83% in the visible, at the same time that they exhibit an almost constant reflectance from 400 to 800 nm, important to develop UV sensors with enhanced sensitivity. Furthermore, the polycrystalline nanoporous coatings we developed exhibit hydrophobic behaviour, with a static contact angle of 119°, and a contact angle hysteresis of 4.5°, which might contribute to enlarge the durability of such functional films, by the self cleaning effect induced.
我们通过探究镓支架形状、镓的初始量、反应沉积时间和所用金属催化剂产生的影响，优化了在硅衬底上通过化学气相沉积制备多晶纳米多孔氮化镓涂层的沉积条件。这种多晶薄膜通过将硅衬底的反射率降低50%或更多，以及将平面氮化镓样品在紫外光下的反射率降低40%，在可见光下降低83%，从而起到抗反射涂层的作用，同时它们在400至800纳米范围内呈现几乎恒定的反射率，这对于开发具有更高灵敏度的紫外传感器很重要。此外，我们开发的多晶纳米多孔涂层表现出疏水行为，静态接触角为119°，接触角滞后为4.5°，这可能通过诱导的自清洁效应有助于提高这种功能薄膜的耐久性。
