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动态相位变形干涉测量法:抑制振动和空气湍流产生的误差

Dynamic phase-deforming interferometry: suppression of errors from vibration and air turbulence.

作者信息

Zong Yi, Li Jianxin, Duan Mingliang, Chen Guoliang, Lu Wenqian, Zhu Rihong, Chen Lei

出版信息

Opt Lett. 2019 Aug 15;44(16):3960-3963. doi: 10.1364/OL.44.003960.

DOI:10.1364/OL.44.003960
PMID:31415522
Abstract

In this Letter, dynamic phase-deforming interferometry (PDI) is proposed to solve the impact of environmental vibration and air turbulence on the measurement accuracy. Two interference passes, namely, the measurement pass (MP) and carrier-frequency pass (CP), are constructed, utilizing one detector to acquire the fringe patterns of the two passes simultaneously. The relative deformation phases of the CP fringe patterns are calculated with the Fourier transform method; then the phase extraction of the MP is performed via the least squares method to obtain the final phase distribution. The optical layout and phase-extraction algorithm of the PDI method are investigated, and the principle simulation and measurement experiments are performed. The experimental results show that the PDI can provide not only high-precision phase measurement under the influence of environmental vibration and air turbulence, but also has low system complexity and fast measurement speed.

摘要

在本信函中,提出了动态相位变形干涉测量法(PDI)以解决环境振动和空气湍流对测量精度的影响。构建了两个干涉通道,即测量通道(MP)和载波频率通道(CP),利用一个探测器同时采集两个通道的条纹图案。采用傅里叶变换法计算CP条纹图案的相对变形相位;然后通过最小二乘法对MP进行相位提取以获得最终的相位分布。研究了PDI方法的光学布局和相位提取算法,并进行了原理模拟和测量实验。实验结果表明,PDI不仅可以在环境振动和空气湍流影响下提供高精度的相位测量,而且具有低系统复杂度和快速测量速度。

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