Zhengzhou Institute of Light Industry, Zhengzhou, China.
Harbin Institute of Technology, Harbin, China.
SLAS Technol. 2020 Apr;25(2):151-161. doi: 10.1177/2472630319870126. Epub 2019 Aug 19.
The emphasis of this paper lies in the fabrication of a three-layer polydimethylsiloxane chip for micro liquid sample operation. In this paper, the microchannels with a rectangular control layer cross section are fabricated based on a dry-film negative photoresist mold, while the microchannels with a rounded liquid layer cross section are fabricated by a positive photoresist reflow mold. The relationships between temperature and the time of reflow and the arc level of the liquid layer mold are discussed. Different ratios, curing temperatures, and curing times are used to fabricate the two PDMS layers to improve their toughness and plasticity separately. The PDMS slabs with microstructure networks are treated with oxygen plasma to improve their surface properties. The improved surface properties serve to reduce the temperature and time, and improve the sealing strength, which is as effective as adding PDMS in varying ratios. The micro liquid sample operation experiments show that high levels of pinching off and mixing performances on pneumatic microfluidic chips are obtained more easily.
本文的重点在于制作一个三层聚二甲基硅氧烷芯片，用于微液体样本操作。本文基于干膜负性光刻胶模具制作了具有矩形控制层横截面的微通道，而具有圆形液体层横截面的微通道则通过正性光刻胶回流模具制作。讨论了温度与回流时间以及液体层模具的弧形水平之间的关系。采用不同的比例、固化温度和固化时间分别对两个 PDMS 层进行固化，以提高其韧性和可塑性。用氧等离子体处理具有微结构网络的 PDMS 平板，以改善其表面性能。改进后的表面性能可降低温度和时间，并提高密封强度，其效果与按不同比例添加 PDMS 相当。微液体样本操作实验表明，气动微流控芯片更容易实现更高水平的夹断和混合性能。
