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铁电 La:HfO 电容器中的流体印痕和惯性切换。

Fluid Imprint and Inertial Switching in Ferroelectric La:HfO Capacitors.

机构信息

NaMLab gGmbH/TU Dresden , Noethnitzer Strasse 64 , Dresden 01187 , Germany.

Materials Research and Technology Department , Luxembourg Institute of Science and Technology , Belvaux L-4422 , Luxembourg.

出版信息

ACS Appl Mater Interfaces. 2019 Sep 25;11(38):35115-35121. doi: 10.1021/acsami.9b11146. Epub 2019 Sep 10.

DOI:10.1021/acsami.9b11146
PMID:31460741
Abstract

Ferroelectric (FE) HfO-based thin films, which are considered as one of the most promising material systems for memory device applications, exhibit an adverse tendency for strong imprint. Manifestation of imprint is a shift of the polarization-voltage (-) loops along the voltage axis due to the development of an internal electric bias, which can lead to the failure of the writing and retention functions. Here, to gain insight into the mechanism of the imprint effect in La-doped HfO (La:HfO) capacitors, we combine the pulse switching technique with high-resolution domain imaging by means of piezoresponse force microscopy. This approach allows us to establish a correlation between the macroscopic switching characteristics and domain time-voltage-dependent behavior. It has been shown that the La:HfO capacitors exhibit a much more pronounced imprint compared to Pb(Zr,Ti)O-based FE capacitors. Also, in addition to conventional imprint, which evolves with time in the poled capacitors, an easily changeable imprint, termed as "fluid imprint", with a strong dependence on the switching prehistory and measurement conditions, has been observed. Visualization of the domain structure reveals a specific signature of fluid imprint-continuous switching of polarization in the same direction as the previously applied field that continues a long time after the field was turned off. This effect, termed as "inertial switching", is attributed to charge injection and subsequent trapping at defect sites at the film-electrode interface.

摘要

铁电 (FE) HfO 基薄膜被认为是最有前途的用于存储器件应用的材料体系之一,但存在强烈的印记效应的不良趋势。印记的表现是由于内部电场偏置的发展,导致极化-电压 (-) 环沿着电压轴发生偏移,这可能导致写入和保持功能的失败。在这里,为了深入了解 La 掺杂 HfO (La:HfO) 电容器中印记效应的机制,我们结合了脉冲切换技术和通过压电力显微镜进行的高分辨率畴成像。这种方法使我们能够建立宏观开关特性与畴时间-电压相关行为之间的相关性。结果表明,与基于 Pb(Zr,Ti)O 的 FE 电容器相比,La:HfO 电容器表现出更为明显的印记效应。此外,除了在极化电容器中随时间演变的传统印记外,还观察到一种易于变化的印记,称为“流体印记”,其强烈依赖于开关的历史和测量条件。畴结构的可视化揭示了流体印记的特定特征——在与先前施加的电场相同的方向上连续切换极化,即使在电场关闭后很长时间仍会持续。这种效应被称为“惯性切换”,归因于电荷注入和随后在薄膜-电极界面处的缺陷位的捕获。

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