Lu Xiyuan, Lee Jonathan Y, Rogers Steven D, Lin Qiang
Opt Lett. 2019 Sep 1;44(17):4295-4298. doi: 10.1364/OL.44.004295.
We demonstrate the first silicon carbide (SiC) double-microdisk resonator (DMR). The device has a compact footprint with a radius of 24 μm and operates in the ITU high frequency range (3-30 MHz). We develop a multi-layer nanofabrication recipe that yields high optical quality (Q∼10) for the SiC DMR. Because of its strong optomechanical interaction, we observe the thermal-Brownian motions of mechanical modes in a SiC DMR directly at room temperature for the first time, to the best of our knowledge. The observed mechanical modes include fundamental/second-order common modes and fundamental differential (D1) modes. The D1 modes have high mechanical qualities >3800 at around 18.4 MHz tested in vacuum. We further show that optomechanical interactions, including linear and nonlinear optomechanical spring effects, can be observed in a SiC DMR at sub-milliwatt optical power. The SiC DMR has great potential for low-power optomechanical sensing applications in harsh environments.
我们展示了首个碳化硅（SiC）双微盘谐振器（DMR）。该器件占地面积小，半径为24μm，工作在国际电信联盟（ITU）高频范围（3 - 30MHz）。我们开发了一种多层纳米制造工艺，可为SiC DMR产生高光学品质（Q∼10）。据我们所知，由于其强烈的光机械相互作用，我们首次在室温下直接观测到了SiC DMR中机械模式的热布朗运动。观测到的机械模式包括基模/二阶共模和基模差分（D1）模式。在真空中测试时，D1模式在约18.4MHz处具有大于3800的高机械品质。我们进一步表明，在亚毫瓦光功率下，SiC DMR中可以观测到光机械相互作用，包括线性和非线性光机械弹簧效应。SiC DMR在恶劣环境下的低功耗光机械传感应用中具有巨大潜力。
