School of Mechanical and Electrical Engineering, Putian University, Putian, Fujian 351100, People's Republic of China.
J Synchrotron Radiat. 2019 Sep 1;26(Pt 5):1558-1564. doi: 10.1107/S1600577519007823. Epub 2019 Aug 1.
Based on the the third-order aberration theory of plane-symmetric optical systems, this paper studies the effect on aberrations of the second-order accuracy of aperture-ray coordinates and the extrinsic aberrations of this kind of optical system; their calculation expressions are derived. The resultant aberration expressions are then applied to calculate the aberrations of two design examples of soft X-ray and vacuum ultraviolet (XUV) optical systems; images are compared with ray-tracing results using SHADOW software to validate the aberration expressions. The study shows that the accuracy of the aberration expressions is satisfactory.
基于平面对称光学系统的三阶像差理论，本文研究了孔径光线坐标二阶精度和这种光学系统的外部像差对像差的影响；推导了它们的计算表达式。然后，将得到的像差表达式应用于计算软 X 射线和真空紫外（XUV）光学系统的两个设计实例的像差；使用 SHADOW 软件进行光线追迹结果的图像比较，以验证像差表达式的准确性。研究表明，像差表达式的精度令人满意。
