由于退火，非晶氧化锆掺杂钽酸镧薄膜中中间范围有序的高精度检测。

High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing.

机构信息

E. L. Ginzton Laboratory, Stanford University, Stanford, California 94305, USA.

Department of Physics and Quantum Theory Project, University of Florida, Gainesville, Florida 32611, USA.

出版信息

Phys Rev Lett. 2019 Jul 26;123(4):045501. doi: 10.1103/PhysRevLett.123.045501.

DOI:10.1103/PhysRevLett.123.045501

PMID:31491265

Abstract

Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO_{2}-Ta_{2}O_{5}) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.

摘要

了解非晶态薄膜涂层中的局部原子顺序及其与宏观性能因素（如机械损耗）的关系，为加速发现和开发改进的涂层提供了重要途径。对掺锆氧化钽（ZrO_{2}-Ta_{2}O_{5}）非晶态薄膜的高精度 X 射线散射测量表明，中间范围有序（IRO）随着后沉积热处理（退火）而发生系统变化。原子建模捕获并解释了这些变化，并表明该材料具有以金属为中心的多面体的构建块，退火的作用是改变多面体之间的连接。观察到的 IRO 变化与顶角共享多面体与边缘共享多面体的比例变化有关。这些变化与退火时机械损耗的变化相关，表明通过开发具有设计的顶角共享与边缘共享多面体比例的材料，可以降低机械损耗。