Chen Minrui, Luo Weifeng, Xu Zhongqi, Zhang Xueping, Xie Bo, Wang Guanghou, Han Min
National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and Collaborative Innovation Centre of Advanced Microstructures, Nanjing University, 210093, Nanjing, China.
Institute for Advanced Materials and Hubei Key Laboratory of Pollutant Analysis & Reuse Technology, Huibei Normal University, 435002, Huangshi, China.
Nat Commun. 2019 Sep 6;10(1):4024. doi: 10.1038/s41467-019-12030-x.
Tunneling conductance among nanoparticle arrays is extremely sensitive to the spacing of nanoparticles and might be applied to fabricate ultra-sensitive sensors. Such sensors are of paramount significance for various application, such as automotive systems and consumer electronics. Here, we represent a sensitive pressure sensor which is composed of a piezoresistive strain transducer fabricated from closely spaced nanoparticle films deposited on a flexible membrane. Benefited from this unique quantum transport mechanism, the thermal noise of the sensor decreases significantly, providing the opportunity for our devices to serve as high-performance pressure sensors with an ultrahigh resolution as fine as about 0.5 Pa and a high sensitivity of 0.13 kPa. Moreover, our sensor with such an unprecedented response capability can be operated as a barometric altimeter with an altitude resolution of about 1 m. The outstanding behaviors of our devices make nanoparticle arrays for use as actuation materials for pressure measurement.
纳米颗粒阵列之间的隧穿电导对纳米颗粒的间距极为敏感，可用于制造超灵敏传感器。此类传感器对于各种应用（如汽车系统和消费电子产品）至关重要。在此，我们展示了一种灵敏压力传感器，它由一个压阻应变传感器组成，该传感器由沉积在柔性膜上的紧密间隔纳米颗粒薄膜制成。受益于这种独特的量子传输机制，传感器的热噪声显著降低，为我们的器件提供了作为高性能压力传感器的机会，其具有高达约0.5 Pa的超高分辨率和0.13 kPa的高灵敏度。此外，我们具有这种前所未有的响应能力的传感器可作为气压高度计使用，高度分辨率约为1 m。我们器件的出色性能使纳米颗粒阵列可用作压力测量的驱动材料。
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