Gui Sizhe, Yu Binlu, Luo Yumeng, Chen Liang, Li Kwai Hei
School of Microelectronics, Southern University of Science and Technology, Shenzhen, 518055, China.
Foshan Electrical and Lighting Company Ltd., Foshan, 528000, China.
Microsyst Nanoeng. 2024 Nov 1;10(1):162. doi: 10.1038/s41378-024-00766-6.
Despite the importance of positive and negative pressure sensing in numerous domains, the availability of a single sensing unit adept at handling this dual task remains highly limited. This study introduces a compact optical device capable of swiftly and precisely detecting positive and negative pressures ranging from -35 kPa to 35 kPa. The GaN chip, which serves as a core component of the device, is monolithically integrated with light-emitting and light-detecting elements. By combining a deformable PDMS film coated with a hydrophobic layer, the chip can respond to changes in optical reflectance induced by pressure fluctuations. The integrated sensing device has low detection limits of 4.3 Pa and -7.8 Pa and fast response times of 0.14 s and 0.22 s for positive and negative pressure variations, respectively. The device also demonstrates adaptability in capturing distinct human breathing patterns. The proposed device, characterized by its compactness, responsiveness, and ease of operation, holds promise for a variety of pressure-sensing applications.
尽管正负压力传感在众多领域都很重要，但能够处理这一双重任务的单一传感单元仍然极为有限。本研究介绍了一种紧凑的光学装置，它能够快速、精确地检测范围从 -35 kPa 到 35 kPa 的正负压力。作为该装置核心部件的氮化镓芯片与发光和光检测元件单片集成。通过结合涂有疏水层的可变形聚二甲基硅氧烷（PDMS）薄膜，该芯片能够响应由压力波动引起的光学反射率变化。该集成传感装置对于正负压力变化的检测下限分别为 4.3 Pa 和 -7.8 Pa，响应时间分别为 0.14 s 和 0.22 s。该装置在捕捉不同的人类呼吸模式方面也表现出适应性。所提出的装置具有紧凑、响应迅速和操作简便的特点，有望应用于各种压力传感领域。
