Nazir Saood Ibni, Bellouard Yves
Galatea Lab, STI/IMT, Ecole polytechnique fédérale de Lausanne (EPFL), Rue de la Maladière, 71b, Neuchâtel CH-2002, Switzerland.
Micromachines (Basel). 2019 Sep 14;10(9):611. doi: 10.3390/mi10090611.
With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners.
随着超快激光器的出现，新的制造技术应运而生。在微加工中，飞秒激光器的使用不仅为在单一光学透明材料内部进行三维整体制造提供了可能性，还为以纳米分辨率远程且任意地使基板变形提供了一种方法。利用这一原理并将其与挠曲设计相结合，我们展示了一种完全由飞秒激光制成的整体式微镜，通过将器件的某些部分暴露于低能量飞秒脉冲，以非接触方式调整其取向。鉴于该过程的非接触性质，可以以比基于机械定位器的传统技术好多个数量级的分辨率非常精确地控制对准。
