Lin Jintian, Zhou Junxia, Wu Rongbo, Wang Min, Fang Zhiwei, Chu Wei, Zhang Jianhao, Qiao Lingling, Cheng Ya
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Micromachines (Basel). 2019 Sep 15;10(9):612. doi: 10.3390/mi10090612.
We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.
我们展示了通过光学图案化结合化学机械抛光在绝缘体上的铌酸锂（LNOI）上制造单模光波导。所制造的LNOI波导具有近对称的模式轮廓，模式场尺寸约为2.5 µm（半高全宽）。我们开发了一种高精度测量方法，通过该方法对单模波导进行表征，其传播损耗约为0.042 dB/cm。
