Lu Ruochen, Yang Yansong, Li Ming-Huang, Manzaneque Tomas, Gong Songbin
IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Feb;67(2):402-412. doi: 10.1109/TUFFC.2019.2943355. Epub 2019 Sep 24.
We present the first group of GHz broadband SH0 mode acoustic delay lines (ADLs). The implemented ADLs adopt unidirectional transducer designs in a suspended X-cut lithium niobate thin film. The design space of the SH0 mode ADLs at GHz is first theoretically investigated, showing that the large coupling and sufficient spectral clearance to adjacent modes collectively enable the broadband performance of SH0 delay lines. The fabricated devices show 3-dB fractional bandwidth ranging from 4% to 34.3% insertion loss between 3.4 and 11.3 dB. Multiple delay lines have been demonstrated with center frequencies from 0.7 to 1.2 GHz, showing great frequency scalability. The propagation characteristics of SH0 in lithium niobate thin film are experimentally extracted. The demonstrated ADLs can potentially facilitate broadband signal processing applications.
我们展示了首批千兆赫兹宽带SH0模式声延迟线(ADL)。所实现的ADL采用了悬浮的X切铌酸锂薄膜中的单向换能器设计。首先从理论上研究了千兆赫兹频段SH0模式ADL的设计空间,结果表明,其与相邻模式之间的大耦合和足够的频谱间隙共同实现了SH0延迟线的宽带性能。所制造的器件显示出3分贝分数带宽范围为4%至34.3%,插入损耗在3.4至11.3分贝之间。已经展示了多条中心频率在0.7至1.2千兆赫兹之间的延迟线,显示出良好的频率可扩展性。通过实验提取了SH0在铌酸锂薄膜中的传播特性。所展示的ADL有可能促进宽带信号处理应用。