Kuznetsova Iren, Nedospasov Ilya, Smirnov Andrey, Anisimkin Vladimir, Roshchupkin Dmitry, Signore Maria-Assunta, Francioso Luca, Kondoh Jun, Serebrov Mikhail, Kashin Vadim, Kolesov Vladimir
Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia.
Institute of Microelectronics Technology and High-Purity Materials Russian Academy of Sciences, 142432 Chernogolovka, Russia.
Sensors (Basel). 2021 Jun 10;21(12):4000. doi: 10.3390/s21124000.
In this research, beam focusing in lithium niobate plate was studied for fundamental anti-symmetric (A) and symmetric (S) Lamb waves, and the shear-horizontal (SH) wave of zero-order. Using the finite element method, appropriate configuration of the interdigital transducer with arc-like electrodes was modeled accounting for the anisotropy of the slowness curves and dispersion of the modes in the plate. Profiles of the focalized acoustic beams generated by the proposed transducer were theoretically analyzed. Based on the result of the analysis, relevant delay lines were fabricated and transfer functions (insertion loss) of the line were measured for SH wave in YX-lithium niobate plate. Using an electron scanning microscope, distribution of the electric fields of the same wave were visualized. The results of this study may be useful for hybrid devices and sensors combining nano and acoustoelectronic principles.
在本研究中，针对基本反对称（A）和对称（S）兰姆波以及零阶水平剪切（SH）波，研究了铌酸锂板中的波束聚焦。采用有限元方法，考虑到慢度曲线的各向异性和板中模式的色散，对具有弧形电极的叉指换能器的适当配置进行了建模。从理论上分析了所提出的换能器产生的聚焦声束的轮廓。基于分析结果，制作了相关延迟线，并测量了YX铌酸锂板中SH波的线传递函数（插入损耗）。使用电子扫描显微镜，可视化了同一波的电场分布。本研究结果可能对结合纳米和声电原理的混合器件及传感器有用。
