基于微型悬臂梁的光声气体传感器频率响应模拟的全耦合模型。

Fully Coupled Model for Frequency Response Simulation of Miniaturized Cantilever-Based Photoacoustic Gas Sensors.

机构信息

Department of Physics and Astronomy, VU University Amsterdam, 1081 HV Amsterdam, The Netherlands.

LaserLaB Amsterdam, VU University Amsterdam, 1081 HV Amsterdam, The Netherlands.

出版信息

Sensors (Basel). 2019 Nov 2;19(21):4772. doi: 10.3390/s19214772.

DOI:10.3390/s19214772

PMID:31684087

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6864649/

Abstract

To support the development of miniaturized photoacoustic gas sensors, a fully coupled finite element model for a frequency response simulation of cantilever-based photoacoustic gas sensors is introduced in this paper. The model covers the whole photoacoustic process from radiation absorption to pressure transducer vibration, and considers viscous damping loss. After validation with experimental data, the model was further applied to evaluate the possibility of further optimization and miniaturization of a previously reported sensor design.

摘要

为了支持微型光声气体传感器的发展，本文引入了一种基于悬臂梁的光声气体传感器频率响应模拟的完全耦合有限元模型。该模型涵盖了从辐射吸收到压力传感器振动的整个光声过程，并考虑了粘性阻尼损耗。通过与实验数据的验证，该模型进一步应用于评估先前报道的传感器设计进一步优化和微型化的可能性。