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硅基光学微腔中的片上气体检测。

On-chip gas detection in silicon optical microcavities.

作者信息

Robinson Jacob T, Chen Long, Lipson Michal

机构信息

Department of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA.

出版信息

Opt Express. 2008 Mar 17;16(6):4296-301. doi: 10.1364/oe.16.004296.

DOI:10.1364/oe.16.004296
PMID:18542525
Abstract

We demonstrate a chip-scale photonic system for the room-temperature detection of gas composition and pressure using a slotted silicon microring resonator. We measure shifts in the resonance wavelength due to the presence and pressure of acetylene gas and resolve differences in the refractive index as small as 10(-4) in the near-IR. The observed sensitivity of this device (enhanced due to the slot-waveguide geometry) agrees with the expected value of 490 nm/refractive index unit.

摘要

我们展示了一种基于开槽硅微环谐振器的用于室温下气体成分和压力检测的芯片级光子系统。我们测量了由于乙炔气体的存在和压力导致的谐振波长的偏移,并在近红外区域分辨出低至10^(-4)的折射率差异。该器件观察到的灵敏度(由于槽波导几何结构而增强)与490纳米/折射率单位的预期值相符。

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