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采用小间隙石英音叉的石英增强光声光谱传感器。

Quartz-Enhanced Photoacoustic Spectroscopy Sensor with a Small-Gap Quartz Tuning Fork.

机构信息

National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China.

出版信息

Sensors (Basel). 2018 Jun 27;18(7):2047. doi: 10.3390/s18072047.

Abstract

A highly sensitive quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor based on a custom quartz tuning fork (QTF) with a small-gap of 200 μm was demonstrated. With the help of the finite element modeling (FEM) simulation software COMSOL, the change tendency of the QEPAS signal under the influence of the laser beam vertical position and the length of the micro-resonator (mR) were calculated theoretically. Water vapor (H₂O) was selected as the target analyte. The experimental results agreed well with those of the simulation, which verified the correctness of the theoretical model. An 11-fold signal enhancement was achieved with the addition of an mR with an optimal length of 5 mm in comparison to the bare QTF. Finally, the H₂O-QEPAS sensor, which was based on a small-gap QTF, achieved a minimum detection limit (MDL) of 1.3 ppm, indicating an improvement of the sensor performance when compared to the standard QTF that has a gap of 300 μm.

摘要

基于具有 200μm 小间隙的定制石英音叉(QTF),展示了一种高灵敏度的石英增强光声光谱(QEPAS)传感器。借助有限元建模(FEM)模拟软件 COMSOL,从理论上计算了激光束垂直位置和微谐振器(mR)长度对 QEPAS 信号的变化趋势。选择水蒸气(H₂O)作为目标分析物。实验结果与模拟结果吻合较好,验证了理论模型的正确性。与裸 QTF 相比,添加长度为 5mm 的最佳 mR 可将信号增强 11 倍。最后,基于小间隙 QTF 的 H₂O-QEPAS 传感器的最低检测限(MDL)达到 1.3ppm,表明与具有 300μm 间隙的标准 QTF 相比,传感器性能得到了提高。

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