State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083, People's Republic of China. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China.
Nanotechnology. 2020 Apr 10;31(15):155601. doi: 10.1088/1361-6528/ab5d78. Epub 2019 Nov 29.
We have successfully fabricated foreign-catalyst-free GaSb nanowires directly on cleaved Si (111) substrates by molecular-beam epitaxy. We find that GaSb nanowires with the absence and presence of Ga droplets at the tip can be simultaneously obtained on cleaved Si substrates without Ga pre-deposition. Systematic morphological and structural studies verify that the two kinds of nanowires presented have different growth mechanisms, which are vapor-solid and vapor-liquid-solid mechanisms. The growth of GaSb nanowires can also be achieved on cleaved Si (110) and Si (100) substrates. The cleavage plane of the Si substrate has an obvious influence on the growth of the GaSb nanowires. The growth direction and crystal quality of catalyst-free nanowires are independent of the cleavage plane of the substrate. Our results may facilitate the understanding of the growth mechanism of III-V nanowires and the integration of foreign-catalyst-free GaSb nanowire-based devices with mature semiconductor technology.
我们通过分子束外延成功地在 Si(111)衬底上直接制备了无外催化剂 GaSb 纳米线。我们发现,即使没有 Ga 预沉积,在 Si 衬底上也可以同时获得具有和不具有 Ga 液滴尖端的 GaSb 纳米线。系统的形貌和结构研究证实,这两种纳米线具有不同的生长机制,分别为气-固和气-液-固机制。GaSb 纳米线也可以在 Si(110)和 Si(100)衬底上生长。Si 衬底的解理面对 GaSb 纳米线的生长有明显的影响。无催化剂纳米线的生长方向和晶体质量与衬底的解理面无关。我们的研究结果可能有助于理解 III-V 纳米线的生长机制以及无外催化剂 GaSb 纳米线基器件与成熟半导体技术的集成。