Lu Qian, Chen Xifu
School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng City, China.
Sci Prog. 2020 Jan-Mar;103(1):36850419892190. doi: 10.1177/0036850419892190. Epub 2019 Dec 1.
The existing nano-positioning stages are driven by the piezoelectric ceramics, which have features of high accuracy and resolution, but the traditional positioning stage could not meet the requirement of large working space because the displacement of the piezoelectric ceramics is only tens of microns. To solve the contradiction between high accuracy and large working space, a novel non-resonant piezoelectric linear actuator, which adopted the two parallel v-shaped stators as the double driving feet, was proposed, and both its working principle and structure were discussed in detail. The actuator was used to drive the positioning stage directly to obtain the performance of nano-positioning and large working stroke. The experiment results show that the resolution of the actuator is 0.015 μm, and its stable maximum motion speed is 17.4 mm/s, while the degree-of-freedom of step resolution of teach nano-positioning stage is 0.018 μm, 0.016 μm, and 0.3 μrad, respectively. Compared with the traditional positioning stage, the nano-positioning stage driven by the actuators directly also has excellent working stroke. The key performance of both high resolution and large working stroke of the nano-positioning stage was realized based on different motion modes of only one piezoelectric actuator.
现有的纳米定位平台由压电陶瓷驱动，具有高精度和高分辨率的特点，但传统的定位平台无法满足大工作空间的要求，因为压电陶瓷的位移仅为几十微米。为了解决高精度与大工作空间之间的矛盾，提出了一种新型非共振压电直线驱动器，该驱动器采用两个平行的V形定子作为双驱动脚，并详细讨论了其工作原理和结构。该驱动器直接用于驱动定位平台，以获得纳米定位和大工作行程的性能。实验结果表明，该驱动器的分辨率为0.015μm，稳定最大运动速度为17.4mm/s，而每个纳米定位平台的步长分辨率自由度分别为0.018μm、0.016μm和0.3μrad。与传统定位平台相比，由该驱动器直接驱动的纳米定位平台也具有出色的工作行程。仅基于一个压电驱动器的不同运动模式，实现了纳米定位平台高分辨率和大工作行程的关键性能。
