Key Laboratory of CNC Equipment Reliability, Ministry of Education, School of Mechanical and Aerospace Engineering, Jilin University, Changchun, Jilin 130022, China.
Rev Sci Instrum. 2022 Jan 1;93(1):015010. doi: 10.1063/5.0065174.
The stick-slip piezoelectric actuator is a promising type for precision positioning with large stroke and high resolution; however, it is still challenging to achieve high motion speed at a relatively low driving frequency. To solve this problem, a novel two-stage amplification mechanism (TSAM) was designed, and correspondingly, a stick-slip piezoelectric actuator was developed. The structure, two-stage amplification principle, and motion processes of the designed actuator were addressed in detail, followed by analyzing the displacement amplification ratio and stress of TSAM via the elastic beam method and finite element method, respectively. Then, the actuator prototype was fabricated, and its output performances were tested under various experimental parameters. By comparative analysis with the actuator that only used the first-stage amplification hinge, the significant improvement in stepping displacement was verified when employing the TSAM. The resultant maximum motion speed was 20.05 mm/s, achieved under the locking force of 2 N, the input voltage of 100 V, and the driving frequency of 700 Hz. In addition, the developed actuator still maintained competitive motion resolution and loading capacity. The comparative analysis with some previous studies further indicated that the developed actuator with the TSAM had successfully achieved a relatively high motion speed at a relatively low driving frequency, which would be beneficial to the practical application.
滑杆式压电致动器是一种具有大行程和高分辨率的精密定位的有前途的类型；然而，在相对较低的驱动频率下实现高速运动仍然具有挑战性。为了解决这个问题，设计了一种新型的两级放大机构（TSAM），并相应地开发了一种滑杆式压电致动器。详细介绍了设计致动器的结构、两级放大原理和运动过程，然后分别通过弹性梁法和有限元法分析了 TSAM 的位移放大比和应力。然后，制造了致动器原型，并在各种实验参数下测试了其输出性能。通过与仅使用第一级放大铰链的致动器进行对比分析，验证了当采用 TSAM 时，步长位移有显著提高。当锁定力为 2 N、输入电压为 100 V、驱动频率为 700 Hz 时，最大运动速度达到 20.05 mm/s。此外，开发的致动器仍然保持着有竞争力的运动分辨率和承载能力。与一些先前的研究进行的对比分析进一步表明，采用 TSAM 的开发致动器成功地在相对较低的驱动频率下实现了较高的运动速度，这将有利于实际应用。
