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基于垂直石墨烯场效应晶体管的高灵敏度气体传感器。

High sensitive gas sensor based on vertical graphene field effect transistor.

作者信息

Song Hang, Liu Jie, Lu Haiyang, Chen Chao, Ba Long

机构信息

State Key Laboratory of Bioelectronics, School of Biology and Biomedical Engineering, Southeast University, Nanjing, 210096, People's Republic of China.

出版信息

Nanotechnology. 2020 Apr 17;31(16):165503. doi: 10.1088/1361-6528/ab668a. Epub 2019 Dec 31.

Abstract

A gas sensor made from graphene vertical field effect transistor (VGr-FET) has been fabricated using graphene as the source electrode, C thin film as the semiconductor layer and aluminum thin film as the drain electrode. The on/off ratio of transistor gated by bottom electrode with ionic liquid gel as dielectric layer is derived to be 10 from measured source-drain current I . The apparent energy barrier height between the graphene and polycrystalline fullerene was calculated from the model of heterojunction diode I-V response curves. The barrier height φ was altered by the gating potential vertically applied on graphene sheet, resulting the large on/off ratio of the transistor. The effect of surface adsorption of water vapor, oxygen, ammonia and isoprene gas phase molecules on the I was measured. The lower limit of detection (LOD) for ammonia (86 ppb) than that of isoprene (420 ppb) is attributed to the donor nature of ammonia contact with p-type graphene, and the adsorbed donor leads to a corresponding positive gating effect to the VGr-FET. This facile, low cost and quick responsive device shows promise for early diagnose of severe human respiratory diseases.

摘要

一种由石墨烯垂直场效应晶体管(VGr-FET)制成的气体传感器,以石墨烯作为源电极,碳薄膜作为半导体层,铝薄膜作为漏电极。以离子液体凝胶作为介电层,由底部电极栅控的晶体管的开/关比,根据测量的源漏电流I得出为10。根据异质结二极管I-V响应曲线模型计算出石墨烯与多晶富勒烯之间的表观能垒高度。通过垂直施加在石墨烯片上的栅极电势改变势垒高度φ,从而导致晶体管具有较大的开/关比。测量了水蒸气、氧气、氨和异戊二烯气相分子的表面吸附对I的影响。氨的检测下限(86 ppb)低于异戊二烯(420 ppb),这归因于氨与p型石墨烯接触的供体性质,并且吸附的供体对VGr-FET产生相应的正栅极效应。这种简便、低成本且响应迅速的器件有望用于严重人类呼吸道疾病的早期诊断。

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