3D dark-field confocal microscopy for subsurface defects detection.

The three-dimensional (3D) precision measurement of subsurface defects (SSDs) remains a long-term, critical, and urgent challenge in advanced manufacturing technology. In this study, we present a 3D dark-field confocal microscopy technique with complementary illumination and detection apertures to detect the SSD in ultraprecise optical components, which are widely employed at laser fusion facilities. Under an annular illumination generated using a pair of axicons, the specular reflected beam from the surface can be blocked by a diaphragm placed in the detection path, while the scattered beam from the SSD can be effectively collected by the detector. Both surface topography and subsurface defects distribution can be measured simultaneously by this method. We constructed a dark-field confocal microscope that could readily detect the SSD 60 µm beneath the surface in neodymium glass. Furthermore, the 3D volume distributions of the SSD were also reconstructed.