嵌段共聚物定向自组装过程中可公度性驱动的取向控制

Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly.

作者信息

Yun Hyun Su, Do Hyung Wan, Berggren Karl K, Ross Caroline A, Choi Hong Kyoon

机构信息

Division of Advanced Materials Engineering, Kongju National University, Cheonan 31080, Republic of Korea.

Department of Chemical & Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.

出版信息

ACS Appl Mater Interfaces. 2020 Mar 4;12(9):10852-10857. doi: 10.1021/acsami.9b22104. Epub 2020 Feb 18.

DOI:10.1021/acsami.9b22104

PMID:32024362

Abstract

In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.

摘要

在本研究中，使用一种简单的模板设计规则来控制嵌段共聚物（BCP）图案在地形模板中的取向。通过使用具有一个匹配尺寸和一个不匹配尺寸的模板来选择图案的取向。通过调整模板壁厚，可以将BCP图案的一系列二元状态编程为所需的布局。