Opt Lett. 2020 Feb 15;45(4):897-900. doi: 10.1364/OL.384249.
In this Letter, we demonstrate a laser fabrication strategy that uses the long focal depth femtosecond axilens laser beam to manufacture the high-aspect-ratio (HAR) micropillars and atomic force microscopy (AFM) probes by one-step exposure. The long depth of focus is generated by modulating laser beam focused at different positions. By adjusting the exposure height, the morphology of HAR micropillars can be tuned flexibly, and the micropillar with an ultra-high aspect ratio (diameter of 1.5 µm, height of 102 µm, ${\rm AR}={70}$AR=70) can be fabricated within 10 ms which is a great challenge for other processing methods to obtain such a HAR microstructure in such a short time. In addition, the HAR micropillar is fabricated onto a cantilever to form the AFM probe. The homemade probe shows fine imaging quality. This method greatly improves the processing efficiency while ensuring the fabrication resolution which provides a powerful method for processing HAR microstructures.
在这封信件中，我们展示了一种激光制造策略，该策略使用长焦深飞秒轴镜激光束通过一步曝光来制造高纵横比（HAR）微柱和原子力显微镜（AFM）探针。长焦距是通过调制聚焦在不同位置的激光束产生的。通过调整曝光高度，可以灵活地调整 HAR 微柱的形态，并且可以在 10 ms 内制造出超高纵横比（直径为 1.5 µm，高度为 102 µm，AR=70AR=70）的微柱，这对于其他加工方法来说是一个巨大的挑战，因为其他方法很难在如此短的时间内获得如此高纵横比的微结构。此外，我们将 HAR 微柱制造到悬臂梁上以形成 AFM 探针。自制的探针显示出良好的成像质量。这种方法在保证制造分辨率的同时大大提高了加工效率，为处理 HAR 微结构提供了一种强大的方法。
