Nanomatériaux pour les Systèmes Sous Sollicitations Extrêmes (NS3E), UMR 3208 ISL/CNRS/UNISTRA, French-German Research Institute of Saint-Louis, 5, rue du Général Cassagnou, 68300 Saint-Louis, France.
Institut Jean Lamour, CNRS - Université de Lorraine, UMR 7198, Campus Artem, Allée André Guinier, 54011 Nancy, France.
Sensors (Basel). 2020 Feb 15;20(4):1061. doi: 10.3390/s20041061.
Microcantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper oxide (CuO) nanorods. The synthesis of the nanostructure consists of the oxidation of a copper layer deposited beforehand on the surface of the sample. The oxidation is performed in an alkaline solution containing a mixture of Na(OH) and (NH)SO. The synthesis procedure was first optimized on a silicon wafer, then transferred to optical cantilever-based sensors. This transfer requires specific synthesis modifications in order to cover all the cantilever with nanorods. A masking procedure was specially developed and the copper layer deposition was also optimized. These nanostructured cantilevers were engineered in order to detect vapors of organophosphorous chemical warfare agents (CWA). The nanostructured microcantilevers were exposed to various concentration of dimethyl methylphosphonate (DMMP) which is a well-known simulant of sarin (GB). The detection measurements showed that copper oxide is able to detect DMMP via hydrogen interactions. The results showed also that the increase of the microcantilever surface with the nanostructures improves the sensors efficiency. The evolution of the detection performances of the CuO nanostructured cantilevers with the DMMP concentration was also evaluated.
微悬臂梁尽管表面较小，但却是非常有前途的敏感传感器。为了增加其表面积，从而提高其灵敏度，我们使用氧化铜（CuO）纳米棒对其进行了纳米结构化处理。该纳米结构的合成包括预先沉积在样品表面上的铜层的氧化。氧化是在含有 Na(OH) 和 (NH)SO 的碱性溶液中进行的。该合成过程首先在硅晶片上进行了优化，然后转移到基于光学悬臂梁的传感器上。为了用纳米棒覆盖整个悬臂梁，需要进行特定的合成修改。特别开发了一种掩蔽程序，并且还优化了铜层沉积。这些经过纳米结构化处理的悬臂梁被设计用于检测有机磷化学战剂（CWA）的蒸气。纳米结构化的微悬臂梁暴露于不同浓度的二甲甲基膦酸酯（DMMP）中，DMMP 是沙林（GB）的已知模拟物。检测测量表明，氧化铜能够通过氢键相互作用检测 DMMP。结果还表明，纳米结构增加了微悬臂梁的表面积，从而提高了传感器的效率。还评估了 CuO 纳米结构化悬臂梁的检测性能随 DMMP 浓度的变化。
