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聚二甲基硅氧烷印刷模板的选择性臭氧处理用于选择性银金属化:提高图案化柔性/可拉伸电子产品分辨率的新方法。

Selective ozone treatment of PDMS printing stamps for selective Ag metallization: A new approach to improving resolution in patterned flexible/stretchable electronics.

机构信息

Department of Materials, University of Oxford, Parks Road, OX1 3PH, United Kingdom.

Department of Materials, University of Oxford, Parks Road, OX1 3PH, United Kingdom.

出版信息

J Colloid Interface Sci. 2020 May 15;568:273-281. doi: 10.1016/j.jcis.2020.02.008. Epub 2020 Feb 11.

Abstract

HYPOTHESIS

Selective ozone treatment of Polydimethylsiloxane (PDMS) print-stamps may facilitate local de-wetting of Krytox®1506 oil; the resulting printed pattern can be used as a masking liquid during roll-to-roll vacuum-metallization, exemplified with Ag. This novel method may exploit high-throughput manufacture without chemical etchants or elevated temperatures for thin-film electronics.

EXPERIMENTS

The mechanism for selective wetting arose from O treatment of PDMS through a shadow-mask to vary surface-energy due to formation of polar silanol (Si-OH) replacing surface methyl groups leading to contact angle reduction from 40°-9° for oil on PDMS. Oiled PDMS was (1) metalized itself and (2) used as a stamp to print onto polyethylene-terephthalate, consisting of oil pick-up/de-wetting/transfer-to-substrate/metallization.

FINDINGS

Ag (520-568 nm) thick was deposited outside oiled regions, surpassing ~20 μm resolution of commercial printing. On metalized PDMS, minimum line widths were 2.6 μm (with 10 μm edge-grading from centrifugal oil spreading) or widths of 24 μm (no Ag grading) following spin-coating/roll-coating oil respectively. The progressive effect of thinning oil via five successive stamp-to-substrate impressions, produced line widths of 14 μm (with graded edge of 7.6 μm via spreading from stamp-substrate compression). Developments may reduce reliance on laser engraving/photocuring, and could enhance micro-contact printing through liquid dynamics vs. topographical relief structures.

摘要

假设

对聚二甲基硅氧烷(PDMS)印刷模板进行选择性臭氧处理可能有助于 Krytox®1506 油的局部去湿;由此产生的印刷图案可在卷对卷真空镀膜过程中用作掩蔽液,以 Ag 为例。这种新方法可以利用高通量制造,而无需使用化学蚀刻剂或升高温度来制造薄膜电子设备。

实验

选择性润湿的机制是通过阴影掩模对 PDMS 进行 O 处理,由于形成极性硅醇(Si-OH)取代表面甲基基团,从而导致表面能发生变化,从而使油在 PDMS 上的接触角从 40°降低到 9°。涂油 PDMS 本身(1)进行金属化,(2)用作印章,将其印刷到聚对苯二甲酸乙二醇酯上,包括油的拾取/去湿/转移到基底/金属化。

发现

在涂油区域外沉积了厚达 520-568nm 的 Ag,超过了商业印刷的 20μm 分辨率。在金属化 PDMS 上,最小线宽为 2.6μm(由于离心油扩散的边缘渐变为 10μm)或 24μm(无 Ag 渐变),分别采用旋涂/辊涂油。通过连续五次将印模压到基底上,油逐渐变薄,产生了 14μm 的线宽(通过印模-基底压缩的扩散,边缘渐变 7.6μm)。这些进展可能减少对激光雕刻/光固化的依赖,并通过与形貌浮雕结构相比的液体动力学来增强微接触印刷。

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