Liang Shuting, Chen Xingyan, Li Fengjiao, Song Na
College of Chemical and Environmental Engineering, Chongqing University of Arts and Sciences, Chongqing 402160, China.
Chongqing Key Laboratory of Environmental Materials & Remediation Technologies, Chongqing University of Arts and Sciences, Chongqing 402160, China.
Bioengineering (Basel). 2022 Jan 30;9(2):59. doi: 10.3390/bioengineering9020059.
Conventional patterning methods for producing liquid metal (LM) electronic circuits, such as the template method, use chemical etching, which requires long cycle times, high costs, and multiple-step operations. In this study, a novel and reliable laser engraving micro-fabrication technology was introduced, which was used to fabricate personalized patterns of LM electronic circuits. First, by digitizing the pattern, a laser printing technology was used to burn a polyethylene (PE) film, where a polydimethylsiloxane (PDMS) or paper substrate was used to produce grooves. Then, the grooves were filled with LM and the PE film was removed; finally, the metal was packaged with PDMS film. The experimental results showed that the prepared LM could fabricate precise patterned electronic circuits, such as golden serpentine curves and Peano curves. The minimum width and height of the LM circuit were 253 μm and 200 μm, respectively, whereas the printed LM circuit on paper reached a minimum height of 26 μm. This LM flexible circuit could also be adapted to various sensor devices and was successfully applied to heart rate detection. Laser engraving micro-processing technologies could be used to customize various high-resolution LM circuit patterns in a short time, and have broad prospects in the manufacture of flexible electronic equipment.
用于制造液态金属(LM)电子电路的传统图案化方法,如模板法,采用化学蚀刻,这需要较长的周期时间、高昂的成本以及多步操作。在本研究中,引入了一种新颖且可靠的激光雕刻微加工技术,用于制造个性化的LM电子电路图案。首先,通过对图案进行数字化处理,利用激光打印技术烧蚀聚乙烯(PE)薄膜,在其上使用聚二甲基硅氧烷(PDMS)或纸质基底制作凹槽。然后,用LM填充凹槽并去除PE薄膜;最后,用PDMS薄膜对金属进行封装。实验结果表明,制备的LM能够制造出精确图案化的电子电路,如金色的蛇形曲线和皮亚诺曲线。LM电路的最小宽度和高度分别为253μm和200μm,而在纸上打印的LM电路最小高度达到26μm。这种LM柔性电路还可适配各种传感器设备,并成功应用于心率检测。激光雕刻微加工技术能够在短时间内定制各种高分辨率的LM电路图案,在柔性电子设备制造方面具有广阔前景。