Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China.
University of Science and Technology of China, Hefei 230026, China.
Sensors (Basel). 2020 Feb 26;20(5):1270. doi: 10.3390/s20051270.
A fully integrated photoacoustic nitrogen dioxide (NO) sensor is developed and demonstrated. In this sensor, an embedded photoacoustic cell was manufactured by using an up-to-date 3D printing technique. A blue laser diode was used as a light source for excitation of photoacoustic wave in the photoacoustic cell. The photoacoustic wave is detected by a sensitive microelectromechanical system (MEMS) microphone. Homemade circuits are integrated into the sensor for laser diode driving and signal processing. The sensor was calibrated by using a chemiluminescence NO-NO-NO gas analyzer. And the performance of this sensor was evaluated. The linear relationship between photoacoustic signals and NO concentrations was verified in a range of below 202 ppb. The limit of detection was determined to 0.86 ppb with an integration time of 1 s. The corresponding normalized noise equivalent absorption was 2.0 × 10 cm∙W∙Hz. The stability and the optimal integration time were evaluated with an Allan deviation analysis, from which a detection limit of 0.25 ppb at the optimal integration time of 240 s was obtained. The sensor was used to measure outdoor air and the results agree with that obtained from the NO-NO-NO gas analyzer. The low-cost and portable photoacoustic NO sensor has a potential application for atmospheric NO monitoring.
一种完全集成的光声二氧化氮(NO)传感器被开发并得到验证。在该传感器中,通过使用最新的 3D 打印技术制造了嵌入式光声单元。一个蓝色激光二极管被用作光声单元中光声波的激发光源。光声波由灵敏的微机电系统(MEMS)麦克风检测。自制电路被集成到传感器中,用于激光二极管驱动和信号处理。该传感器通过化学发光 NO-NO-NO 气体分析仪进行校准,并对其性能进行了评估。在低于 202 ppb 的范围内验证了光声信号与 NO 浓度之间的线性关系。在 1 s 的积分时间下,检测限确定为 0.86 ppb。相应的归一化噪声等效吸收为 2.0×10^-6 cm∙W∙Hz。通过 Allan 偏差分析评估了稳定性和最佳积分时间,从中获得了在最佳积分时间 240 s 下检测限为 0.25 ppb 的结果。该传感器用于测量室外空气,结果与从 NO-NO-NO 气体分析仪获得的结果一致。这种低成本、便携式的光声 NO 传感器具有用于大气 NO 监测的潜在应用。