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用于亚 ppb 级测量的全集成光声 NO 传感器。

Fully Integrated Photoacoustic NO Sensor for Sub-ppb Level Measurement.

机构信息

Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China.

University of Science and Technology of China, Hefei 230026, China.

出版信息

Sensors (Basel). 2020 Feb 26;20(5):1270. doi: 10.3390/s20051270.

DOI:10.3390/s20051270
PMID:32110962
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7085709/
Abstract

A fully integrated photoacoustic nitrogen dioxide (NO) sensor is developed and demonstrated. In this sensor, an embedded photoacoustic cell was manufactured by using an up-to-date 3D printing technique. A blue laser diode was used as a light source for excitation of photoacoustic wave in the photoacoustic cell. The photoacoustic wave is detected by a sensitive microelectromechanical system (MEMS) microphone. Homemade circuits are integrated into the sensor for laser diode driving and signal processing. The sensor was calibrated by using a chemiluminescence NO-NO-NO gas analyzer. And the performance of this sensor was evaluated. The linear relationship between photoacoustic signals and NO concentrations was verified in a range of below 202 ppb. The limit of detection was determined to 0.86 ppb with an integration time of 1 s. The corresponding normalized noise equivalent absorption was 2.0 × 10 cm∙W∙Hz. The stability and the optimal integration time were evaluated with an Allan deviation analysis, from which a detection limit of 0.25 ppb at the optimal integration time of 240 s was obtained. The sensor was used to measure outdoor air and the results agree with that obtained from the NO-NO-NO gas analyzer. The low-cost and portable photoacoustic NO sensor has a potential application for atmospheric NO monitoring.

摘要

一种完全集成的光声二氧化氮（NO）传感器被开发并得到验证。在该传感器中，通过使用最新的 3D 打印技术制造了嵌入式光声单元。一个蓝色激光二极管被用作光声单元中光声波的激发光源。光声波由灵敏的微机电系统（MEMS）麦克风检测。自制电路被集成到传感器中，用于激光二极管驱动和信号处理。该传感器通过化学发光 NO-NO-NO 气体分析仪进行校准，并对其性能进行了评估。在低于 202 ppb 的范围内验证了光声信号与 NO 浓度之间的线性关系。在 1 s 的积分时间下，检测限确定为 0.86 ppb。相应的归一化噪声等效吸收为 2.0×10^-6 cm∙W∙Hz。通过 Allan 偏差分析评估了稳定性和最佳积分时间，从中获得了在最佳积分时间 240 s 下检测限为 0.25 ppb 的结果。该传感器用于测量室外空气，结果与从 NO-NO-NO 气体分析仪获得的结果一致。这种低成本、便携式的光声 NO 传感器具有用于大气 NO 监测的潜在应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/d8d2a0183812/sensors-20-01270-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/74ef81f5c0b4/sensors-20-01270-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/80acbaed2dd6/sensors-20-01270-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/a00e0fce1d81/sensors-20-01270-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/136d09800b4d/sensors-20-01270-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/193d854ec1bf/sensors-20-01270-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/9d3dfbe98191/sensors-20-01270-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/d8d2a0183812/sensors-20-01270-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/74ef81f5c0b4/sensors-20-01270-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/80acbaed2dd6/sensors-20-01270-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/a00e0fce1d81/sensors-20-01270-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/136d09800b4d/sensors-20-01270-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/193d854ec1bf/sensors-20-01270-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/9d3dfbe98191/sensors-20-01270-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7db2/7085709/d8d2a0183812/sensors-20-01270-g007.jpg

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