Okumura Kazuki, Takeda Tatsuto, Ishihara Masaki, Onishi Koji, Hamada Kouta, Omori Takayuki, Kubo Wataru, Harisaki Shuhei, Kato Yushi
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan.
Rev Sci Instrum. 2020 Feb 1;91(2):023311. doi: 10.1063/1.5128465.
Electron cyclotron resonance ion sources (ECRISs) are widely applied for ion beam applications, e.g., plasma processing, cancer therapy, and ion engine of an artificial satellite. In our ECRIS, we aim at producing and extracting various ion beams from this device, in particular, Xe ion beams at low energy. In the aerospace engineering field, there are problems of accumulated damages on various component materials caused by low energy of Xe ions from the engine. There are not enough experimental sputtering data for satellite materials at the Xe in the low energy region. Then, we are trying to investigate the sputtering yield experimentally by irradiating the low energy Xe ion beams. To perform this experiment, it is necessary to acquire a certain amount of beam current with low energy. Then, we generate the low energy ion beams by the following steps: First, the ion beams are extracted from the ECRIS at high voltage. Next, these are transported to an ion beam irradiation system (IBIS). Finally, the ion beams are decelerated by the deceleration voltage in the IBIS. We adjusted the beamline. We measure the characteristics of the transport efficiency and decelerated ion beam currents. In this paper, we describe the experimental setup using an existing ECRIS for decelerated heavy ion beams and the results of decelerated ion beam currents.
电子回旋共振离子源（ECRISs）被广泛应用于离子束应用领域，例如等离子体处理、癌症治疗以及人造卫星的离子发动机。在我们的ECRIS中，我们旨在从该装置产生并提取各种离子束，特别是低能量的Xe离子束。在航空航天工程领域，存在发动机中低能量Xe离子对各种部件材料造成累积损伤的问题。在低能量区域的Xe条件下，针对卫星材料的实验溅射数据不足。因此，我们试图通过辐照低能量Xe离子束来实验研究溅射产额。为了进行该实验，有必要获得一定量的低能量束流。然后，我们通过以下步骤产生低能量离子束：首先，离子束在高电压下从ECRIS中提取出来。接下来，将它们传输到离子束辐照系统（IBIS）。最后，离子束在IBIS中通过减速电压进行减速。我们调整了束线。我们测量了传输效率和减速离子束电流的特性。在本文中，我们描述了使用现有的ECRIS进行减速重离子束的实验装置以及减速离子束电流的结果。
