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通过同轴电弧等离子体沉积制造的n型硅/B掺杂p型超纳米晶金刚石异质结的二极管参数及等效电路模型

Diode Parameters and Equivalent Electrical Circuit Model of -Type Silicon/B-Doped -Type Ultrananocrystalline Diamond Heterojunctions Manufactured Through Coaxial Arc Plasma Deposition.

作者信息

Chaleawpong Rawiwan, Promros Nathaporn, Charoenyuenyao Peerasil, Sittimart Phongsaphak, Takeichi Satoshi, Katamune Yūki, Zkria Abdelrahman, Abubakr Eslam, Egiza Mohamed, Ali Ali Mohamed, Yoshitake Tsuyoshi

机构信息

Department of Physics, Faculty of Science, King Mongkut's Institute of Technology Ladkrabang, Ladkrabang, Bangkok, 10520, Thailand.

Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka, 816-8580, Japan.

出版信息

J Nanosci Nanotechnol. 2020 Aug 1;20(8):4884-4891. doi: 10.1166/jnn.2020.17838.

Abstract

Coaxial arc plasma deposition (CAPD) was employed to manufacture n-type silicon/boron-doped p-type ultrananocrystalline diamond heterojunctions. Measurement and analysis of their dark current density-voltage curve were carried out at room temperature in order to calculate the requisite junction parameters using the Cheung and Norde approaches. For the calculation based on the Cheung approach, the series resistance (), ideality factor () and barrier height () were 4.58 kΩ, 2.82 and 0.75 eV, respectively. The values of and were in agreement with those calculated using the Norde approach. Their characteristics for alternative current impedance at different frequency values were measured and analyzed as a function of the voltage (V) values ranging from 0 V to 0.5 V. Appearance of the real (') and imaginary (″) characteristics for all values presented single semicircles. The centers of the semicircular curves were below the ' axis and the diameter of the semicircles decreased with increments of the value. The proper equivalent electrical circuit model for the manufactured heterojunction behavior was comprised of combined with the parallel circuit of resistance and constant phase element.

摘要

采用同轴电弧等离子体沉积(CAPD)制备了n型硅/硼掺杂p型超纳米晶金刚石异质结。为了使用张(Cheung)和诺德(Norde)方法计算所需的结参数,在室温下对其暗电流密度 - 电压曲线进行了测量和分析。基于张方法的计算中,串联电阻()、理想因子()和势垒高度()分别为4.58 kΩ、2.82和0.75 eV。和的值与使用诺德方法计算的值一致。测量并分析了它们在不同频率值下的交流阻抗特性,作为电压(V)值在0 V至0.5 V范围内的函数。所有值的实部(')和虚部(″)特性均呈现单个半圆。半圆曲线的中心位于'轴下方,并且半圆的直径随着值的增加而减小。所制备异质结行为的合适等效电路模型由与电阻和恒定相位元件的并联电路组合而成。

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