Sperling Brent A, Maslar James E
Material Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA.
J Vac Sci Technol B Nanotechnol Microelectron. 2019;37(6). doi: 10.1116/1.5125446.
Delivery of low-volatility precursors is a continuing challenge for chemical vapor deposition and atomic layer deposition processes used for microelectronics manufacturing. To aid in addressing this problem, we have recently developed an inline measurement capable of monitoring precursor delivery. Motivated by a desire to better understand the origins of what is now observable, this study uses computational fluid dynamics and a relatively simple model to simulate the delivery of pentakis(dimethylamido)tantalum (PDMAT) from a commercial vapor draw ampoule. Parameters used in the model are obtained by fitting the performance of the ampoule to a limited dataset of PDMAT delivery rates obtained experimentally using a non-dispersive infrared sensor. The model shows good agreement with a much larger experimental dataset over a range of conditions in both pulsed and continuously flowing operation. The combined approach of experiment and simulation provides a means to understand the phenomena occurring during precursor delivery both quantitatively and qualitatively.
对于用于微电子制造的化学气相沉积和原子层沉积工艺而言，输送低挥发性前驱体一直是一项挑战。为了帮助解决这一问题，我们最近开发了一种能够监测前驱体输送的在线测量方法。出于更好地理解当前可观测现象起源的愿望，本研究使用计算流体动力学和一个相对简单的模型来模拟从商用蒸汽抽取安瓿中输送五（二甲基氨基）钽（PDMAT）的过程。模型中使用的参数是通过将安瓿的性能与使用非色散红外传感器实验获得的有限PDMAT输送速率数据集进行拟合而得到的。该模型在脉冲操作和连续流动操作的一系列条件下，与一个大得多的实验数据集显示出良好的一致性。实验与模拟相结合的方法提供了一种定量和定性理解前驱体输送过程中发生现象的手段。
