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可见光和紫外光下薄金属膜的结构相关光学特性

Structure-Related Optical Characteristics of Thin Metallic Films in the Visible and Ultraviolet.

作者信息

Bennett H E, Stanford J L

机构信息

Michelson Laboratories, Naval Weapons Center, China Lake, California 93555.

出版信息

J Res Natl Bur Stand A Phys Chem. 1976 Jul-Aug;80A(4):643-658. doi: 10.6028/jres.080A.064. Epub 1976 Aug 1.

Abstract

Surface irregularities and crystalline order strongly influence both the scattered light and absorption of metallic films. These effects extend through all spectral regions but are particularly important in the visible and ultraviolet. Scattered light arises from several scattering mechanisms. Macroscopic irregularities such as dust, scratches and particulates are typically much less important than are microirregularities only a few tens of angstroms in height but covering the entire surface. For metals such as silver and aluminum, which have plasma edges in the ultraviolet, the excitation of surface plasmons resulting from these microirregularities causes additional incoherently reemitted or "scattered" light. Surface plasmon excitation also causes increased absorption in some wavelength regions. These effects are enhanced by dielectric overcoating layers, which both increase the absorption and scattering and shift the wavelength at which the peak occurs. Surface plasmon excitation is particularly important in the ultraviolet region, where the dielectric overcoating applied to prevent formation of an oxide film on aluminized mirrors, for example, can significantly change the mirror reflectance. Plasmon excitation is made possible by a momentum conserving process associated with material inhomogeneities and hence can presumably be caused by crystalline disorder in the metal surface as well as surface irregularities. If the disorder is present on a sufficiently fine scale, it also affects the band structure of the metal and hence its optical absorption. Examples of the effect of film structure on the optical properties of evaporated and sputtered metal films will be given.

摘要

表面不规则性和晶体有序性对金属薄膜的散射光和吸收都有强烈影响。这些效应贯穿所有光谱区域,但在可见光和紫外光区域尤为重要。散射光源于多种散射机制。诸如灰尘、划痕和微粒等宏观不规则性通常远不如高度仅几十埃但覆盖整个表面的微观不规则性重要。对于在紫外区有等离子体边缘的银和铝等金属,这些微观不规则性导致的表面等离子体激元的激发会产生额外的非相干再发射光或“散射”光。表面等离子体激元的激发还会在某些波长区域导致吸收增加。介质覆盖层会增强这些效应,其既增加吸收和散射,又会使峰值出现的波长发生偏移。表面等离子体激元的激发在紫外区域尤为重要,例如,应用于防止镀铝镜上形成氧化膜的介质覆盖层会显著改变镜面反射率。等离子体激元的激发是由与材料不均匀性相关的动量守恒过程实现的,因此推测可能由金属表面的晶体无序以及表面不规则性引起。如果无序存在于足够精细的尺度上,它也会影响金属的能带结构,进而影响其光吸收。将给出薄膜结构对蒸发和溅射金属薄膜光学性质影响情况的示例。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6a57/5293531/3ec82352e469/jresv80an4p643_a1bf1.jpg

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