Liang Yan, Zhu Tianfei, Xi Mengjia, Abbasi Haris Naeem, Fu Jiao, Su Rui, Song Zhiqiang, Wang Kaiyue, Wang Hongxing
Opt Express. 2020 Mar 30;28(7):9320-9326. doi: 10.1364/OE.383640.
In this study, to fabricate diamond concave microlenses in a simple manner, an approach that combines a spin coating process with subsequent dry etching was demonstrated. First, photolithography was used to produce cylindrical holes in the photoresist layer on the diamond surface. Then, another photoresist was spin coated to fill the holes, and the concave structures with meniscus shapes were then obtained because of centrifugal force and interfacial tension. Finally, diamond concave microlenses were formed by transferring photoresist concave structures onto a diamond substrate using a dry etching technique. The fabricated diamond microlens exhibits a low surface roughness with nanometers as well as high-quality imaging and focusing performances, which is expected to have a wider range of potential applications under harsh and special conditions.
在本研究中，为了以简单的方式制造金刚石凹面微透镜，展示了一种将旋涂工艺与后续干法蚀刻相结合的方法。首先，使用光刻技术在金刚石表面的光刻胶层中制造圆柱形孔。然后，旋涂另一种光刻胶以填充这些孔，由于离心力和界面张力，随后获得了具有弯月面形状的凹面结构。最后，通过使用干法蚀刻技术将光刻胶凹面结构转移到金刚石衬底上，形成了金刚石凹面微透镜。所制造的金刚石微透镜具有纳米级的低表面粗糙度以及高质量的成像和聚焦性能，有望在恶劣和特殊条件下具有更广泛的潜在应用。
