Pan An, Gao Bo, Chen Tao, Si Jinhai, Li Cunxia, Chen Feng, Hou Xun
Opt Express. 2014 Jun 16;22(12):15245-50. doi: 10.1364/OE.22.015245.
All-silicon plano-concave microlens arrays with spherical profiles and good image performance were obtained using femtosecond laser direct irradiation and mixed acid etching. A femtosecond laser was employed to produce microhole arrays on silicon, and the microholes were expanded and smoothed by the mixed acid to form concave microlenses. The effects of the etching time, laser power, and pulse number on the microlens morphology were investigated. This method has potential applications in the fabrication of all-silicon plano-concave microlenses for use in infrared devices.
通过飞秒激光直接辐照和混合酸蚀刻，获得了具有球形轮廓和良好成像性能的全硅平凹微透镜阵列。采用飞秒激光在硅上制备微孔阵列，然后通过混合酸使微孔扩大并平滑，以形成凹面微透镜。研究了蚀刻时间、激光功率和脉冲数对微透镜形态的影响。该方法在用于红外器件的全硅平凹微透镜制造中具有潜在应用。
