Li Yang, Liu Huagang, Hong Minghui
Opt Express. 2020 Mar 2;28(5):6242-6250. doi: 10.1364/OE.381268.
Sapphire is a kind of ultrahard transparent material with good chemical resistance. These great properties also make sapphire functional device fabrication a big challenge. We propose a novel dual-beam laser induced plasma assisted ablation (LIPAA) for high-quality sapphire microprocessing. One laser beam is focused on a sacrificial target for nano-particle generation by LIPAA to assist the sapphire ablation by the other laser beam. The new technology can reduce the ablation threshold of sapphire and the roughness of the fabricated structures. The laser fluence for particle generation is optimized. Furthermore, we demonstrate a sapphire Dammann grating and an OAM generator fabricated by this method. This method can be expanded to arbitrary transparent material precision machining for various applications.
蓝宝石是一种具有良好耐化学性的超硬透明材料。这些优异的性能也使得蓝宝石功能器件的制造成为一项巨大的挑战。我们提出了一种新颖的双光束激光诱导等离子体辅助烧蚀（LIPAA）方法用于高质量蓝宝石微加工。一束激光聚焦在牺牲靶材上，通过LIPAA产生纳米颗粒，以辅助另一束激光对蓝宝石进行烧蚀。这项新技术可以降低蓝宝石的烧蚀阈值以及所制造结构的粗糙度。优化了用于产生颗粒的激光能量密度。此外，我们展示了用这种方法制造的蓝宝石达曼光栅和轨道角动量（OAM）发生器。该方法可扩展到用于各种应用的任意透明材料的精密加工。
