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蓝宝石的激光加工与衍射光学元件的制造

Laser processing of sapphire and fabrication of diffractive optical elements.

作者信息

Gottumukkala N R, Gupta M C

出版信息

Appl Opt. 2022 Mar 20;61(9):2391-2397. doi: 10.1364/AO.452810.

Abstract

Sapphire is a high-temperature optical material with a melting temperature of over 2000ºC, high strength, good thermal conductivity, and low thermal expansion, and it exhibits chemical inertness and is optically transparent over a wavelength range of 0.15 µm to 5.5 µm. We report the detailed results of the laser processing of sapphire, fabrication of diffraction gratings, and the photon sieve, which have applications in the infrared spectrum using a nanosecond pulsed laser of 355 nm wavelength. Laser removal rates and surface roughness were studied. The fabricated gratings and photon sieve were characterized in terms of diffracted beam profile, optical diffraction efficiency, surface morphology, and depth profile.

摘要

蓝宝石是一种高温光学材料,其熔点超过2000ºC,具有高强度、良好的热导率和低热膨胀率,并且具有化学惰性,在0.15 µm至5.5 µm的波长范围内是光学透明的。我们报告了蓝宝石激光加工、衍射光栅制造以及光子筛的详细结果,这些在使用波长为355 nm的纳秒脉冲激光的红外光谱中具有应用。研究了激光去除率和表面粗糙度。对制造的光栅和光子筛在衍射光束轮廓、光学衍射效率、表面形态和深度轮廓方面进行了表征。

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