• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

蓝宝石的激光加工与衍射光学元件的制造

Laser processing of sapphire and fabrication of diffractive optical elements.

作者信息

Gottumukkala N R, Gupta M C

出版信息

Appl Opt. 2022 Mar 20;61(9):2391-2397. doi: 10.1364/AO.452810.

DOI:10.1364/AO.452810
PMID:35333258
Abstract

Sapphire is a high-temperature optical material with a melting temperature of over 2000ºC, high strength, good thermal conductivity, and low thermal expansion, and it exhibits chemical inertness and is optically transparent over a wavelength range of 0.15 µm to 5.5 µm. We report the detailed results of the laser processing of sapphire, fabrication of diffraction gratings, and the photon sieve, which have applications in the infrared spectrum using a nanosecond pulsed laser of 355 nm wavelength. Laser removal rates and surface roughness were studied. The fabricated gratings and photon sieve were characterized in terms of diffracted beam profile, optical diffraction efficiency, surface morphology, and depth profile.

摘要

蓝宝石是一种高温光学材料,其熔点超过2000ºC,具有高强度、良好的热导率和低热膨胀率,并且具有化学惰性,在0.15 µm至5.5 µm的波长范围内是光学透明的。我们报告了蓝宝石激光加工、衍射光栅制造以及光子筛的详细结果,这些在使用波长为355 nm的纳秒脉冲激光的红外光谱中具有应用。研究了激光去除率和表面粗糙度。对制造的光栅和光子筛在衍射光束轮廓、光学衍射效率、表面形态和深度轮廓方面进行了表征。

相似文献

1
Laser processing of sapphire and fabrication of diffractive optical elements.蓝宝石的激光加工与衍射光学元件的制造
Appl Opt. 2022 Mar 20;61(9):2391-2397. doi: 10.1364/AO.452810.
2
Flexible binary phase photon sieves on polyimide substrates by laser ablation.聚酰亚胺基底上激光烧蚀制备的柔性双相分束滤光片。
Opt Lett. 2018 May 15;43(10):2368-2371. doi: 10.1364/OL.43.002368.
3
Fabrication of photon sieves by laser ablation and optical properties.通过激光烧蚀制备光子筛及其光学性质
Opt Express. 2017 Dec 11;25(25):31528-31538. doi: 10.1364/OE.25.031528.
4
The Role of Thermal Accumulation on the Fabrication of Diffraction Gratings in Ophthalmic PHEMA by Ultrashort Laser Direct Writing.热积累在通过超短激光直写技术制备眼科聚甲基丙烯酸羟乙酯衍射光栅中的作用
Polymers (Basel). 2020 Dec 11;12(12):2965. doi: 10.3390/polym12122965.
5
Towards Two-Photon Polymerization-Compatible Diffractive Optics for Micro-Mechanical Applications.面向微机械应用的双光子聚合兼容衍射光学器件
Micromachines (Basel). 2023 Jun 27;14(7):1319. doi: 10.3390/mi14071319.
6
Wafer-scale high aspect-ratio sapphire periodic nanostructures fabricated by self-modulated femtosecond laser hybrid technology.通过自调制飞秒激光混合技术制备的晶圆级高纵横比蓝宝石周期性纳米结构。
Opt Express. 2022 Aug 29;30(18):32244-32255. doi: 10.1364/OE.463575.
7
High-quality sapphire microprocessing by dual-beam laser induced plasma assisted ablation.双光束激光诱导等离子体辅助烧蚀实现高质量蓝宝石微加工。
Opt Express. 2020 Mar 2;28(5):6242-6250. doi: 10.1364/OE.381268.
8
Multilevel phase-type diffractive lens embedded in sapphire.嵌入蓝宝石的多级相位型衍射透镜。
Opt Lett. 2017 Oct 1;42(19):3832-3835. doi: 10.1364/OL.42.003832.
9
Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant.蓝宝石选择性激光蚀刻对辐射波长和蚀刻剂的依赖性。
Micromachines (Basel). 2022 Dec 20;14(1):7. doi: 10.3390/mi14010007.
10
Optical switching of liquid-crystal polarization gratings with nanosecond pulses.利用纳秒脉冲实现液晶偏振光栅的光开关。
Opt Lett. 2009 Sep 1;34(17):2554-6. doi: 10.1364/OL.34.002554.

引用本文的文献

1
Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant.蓝宝石选择性激光蚀刻对辐射波长和蚀刻剂的依赖性。
Micromachines (Basel). 2022 Dec 20;14(1):7. doi: 10.3390/mi14010007.
2
Prediction Model for Liquid-Assisted Femtosecond Laser Micro Milling of Quartz without Taper.无锥度石英液体辅助飞秒激光微铣削预测模型
Micromachines (Basel). 2022 Aug 26;13(9):1398. doi: 10.3390/mi13091398.