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氧化铝陶瓷的纳秒-毫秒组合脉冲激光钻孔

Nanosecond-millisecond combined pulse laser drilling of alumina ceramic.

作者信息

Jia Xianshi, Dong Jing, Chen Yongqian, Wang Hailin, Zhu Guangzhi, Kozlov Aleksei, Zhu Xiao

出版信息

Opt Lett. 2020 Apr 1;45(7):1691-1694. doi: 10.1364/OL.383207.

Abstract

A nanosecond-millisecond combined pulse laser (CPL) drilling method was proposed for drilling alumina ceramic. The total energy consumption of the CPL drilling was 1/7 of that of a conventional millisecond laser, and the drilling quality was better. The simulation results demonstrated that, due to the nonuniform reflection of the millisecond laser in the keyhole, the ellipse keyhole ablated by the off-axis incident nanosecond pulses had no effect on the circularity of the through hole. In addition, the multireflection of the laser in the keyhole enhanced the absorption, so the keyhole ablated by the nanosecond pulses could be used as a target for limiting the absorption of the subsequent millisecond pulses. In this context, the keyhole could be used to reduce the hole diameter if the subsequent millisecond laser had a bigger spot size, and this CPL drilling method could be used as an effective group hole drilling method.

摘要

提出了一种用于氧化铝陶瓷钻孔的纳秒-毫秒组合脉冲激光(CPL)钻孔方法。CPL钻孔的总能耗是传统毫秒激光的1/7,且钻孔质量更好。模拟结果表明,由于毫秒激光在键孔中的反射不均匀,离轴入射纳秒脉冲烧蚀的椭圆形键孔对通孔的圆度没有影响。此外,激光在键孔中的多次反射增强了吸收,因此纳秒脉冲烧蚀的键孔可作为限制后续毫秒脉冲吸收的靶标。在此情况下,如果后续毫秒激光光斑尺寸较大,键孔可用于减小孔径,且这种CPL钻孔方法可作为一种有效的群孔钻孔方法。

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