Wang Nan, Jiang Wei, Zhang Yu
Opt Lett. 2020 Apr 1;45(7):1762-1765. doi: 10.1364/OL.383408.
Our group proposes an improved misalignment measurement scheme using the moiré beat signal. Compared with the coarse-fine moiré-based alignment methods, this scheme could complete the nanometer-scale alignment within a centimeter-scale scope in one step. Moreover, it could also fundamentally eliminate the influence from the field of view of the observation lens. These merits make it suitable for the high-precision large-scope misalignment sensing in the proximity, x-ray, and nanoimprint lithographies. The experimental results are given to verify the feasibility and rationality.
我们的团队提出了一种利用莫尔条纹拍频信号改进的对准测量方案。与基于粗-精莫尔条纹的对准方法相比，该方案能够在厘米级范围内一步完成纳米级对准。此外，它还能从根本上消除观察透镜视场的影响。这些优点使其适用于接近光刻、X射线光刻和纳米压印光刻中的高精度大尺寸对准传感。给出了实验结果以验证其可行性和合理性。
