关于基于碳化硅的小型化器件特刊的社论
Editorial for the Special Issue on SiC Based Miniaturized Devices.
作者信息
Saddow Stephen E, Alquier Daniel, Wang Jing, LaVia Francesco, Fraga Mariana
机构信息
Department of Electrical Engineering, University of South Florida, 4202 East Fowler Avenue, ENB118 Tampa, FL 33620, USA.
GREMAN UMR-CNRS 7347, Université de Tours, 16 rue Pierre et Marie CURIE, BP 7155, 37071 Tours Cedex 2, France.
出版信息
Micromachines (Basel). 2020 Apr 13;11(4):405. doi: 10.3390/mi11040405.
Abstract
The MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc [...].
摘要
如今，微机电系统（MEMS）设备在许多电子设备和系统中都能找到，从汽车中的安全气囊传感器到智能手机、嵌入式系统等等[……]。
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