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用于可见光至近红外光的光闸控制氧化锌光电探测器响应

Photogating-controlled ZnO photodetector response for visible to near-infrared light.

作者信息

Wang Yang, Zhong Fang, Wang Hailu, Huang Hao, Li Qing, Ye Jiafu, Peng Meng, He Ting, Chen Yunfeng, Wang Yueming, Zhang Lili, Zhu He, Wang Xianying

机构信息

School of Materials Science and Engineering, University of Shanghai for Science & Technology, Shanghai 200093 People's Republic of China. State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433 People's Republic of China. Key Laboratory of Space Active Opto-Electronics Technology and State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083 People's Republic of China. These authors contributed equally to this work.

出版信息

Nanotechnology. 2020 Aug 14;31(33):335204. doi: 10.1088/1361-6528/ab8e75. Epub 2020 Apr 29.

Abstract

In recent years, as a direct wide band gap semiconductor, zinc oxide (ZnO) nanomaterial has attracted a lot of attention. However, the widely investigated ZnO materials are strongly limited in fast-response and broadband photodetectors due to their inherent weaknesses, so an effective structure or mechanism of ZnO nanostructure photodetector is greatly needed. In this work, a photogating-controlled photodetector based on a ZnO nanosheet-HfO-lightly doped Si architecture is demonstrated. Its performance was significantly improved by the photogating-controlled local field at the Si and HfO interfaces compared to the findings in other published works on ZnO. Consequently, the photodetector not only effectively balances the responsivity (as high as 5.6 A W) and response time (400 µs), but also broadens the wavelength response of the ZnO-based photodetectors from visible to near-infrared light range (~1200 nm). Additionally, the photogating-controlled ZnO photodetector enables high-resolution imaging both in the visible and near-infrared bands. Our photogating-controlled ZnO photodetectors not only exemplify the controllability of the gate electrode in high mobility materials but also provide a basis for the development of fast speed and high responsivity detection of high mobility materials.

摘要

近年来,作为一种直接宽带隙半导体,氧化锌(ZnO)纳米材料引起了广泛关注。然而,由于其固有缺陷,被广泛研究的ZnO材料在快速响应和宽带光电探测器方面受到很大限制,因此迫切需要一种有效的ZnO纳米结构光电探测器的结构或机制。在这项工作中,展示了一种基于ZnO纳米片-HfO-轻掺杂硅结构的光控光电探测器。与其他已发表的关于ZnO的研究结果相比,其性能通过Si和HfO界面处的光控局部场得到了显著改善。因此,该光电探测器不仅有效地平衡了响应度(高达5.6 A/W)和响应时间(400 μs),还将基于ZnO的光电探测器的波长响应从可见光拓宽到近红外光范围(~1200 nm)。此外,光控ZnO光电探测器能够在可见光和近红外波段实现高分辨率成像。我们的光控ZnO光电探测器不仅体现了栅电极在高迁移率材料中的可控性,还为高迁移率材料的快速、高响应度检测的发展提供了基础。

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