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优化的全向表面声波源:用于声流体ics的152°Y轴旋转切割铌酸锂

Optimized, Omnidirectional Surface Acoustic Wave Source: 152° Y-Rotated Cut of Lithium Niobate for Acoustofluidics.

作者信息

Zhang Naiqing, Mei Jiyang, Gopesh Tilvawala, Friend James

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Oct;67(10):2176-2186. doi: 10.1109/TUFFC.2020.2993766. Epub 2020 May 11.

DOI:10.1109/TUFFC.2020.2993766
PMID:32396083
Abstract

Here, we propose an optimized Y -rotated cut of lithium niobate (LN) for multidirectional surface acoustic wave (SAW) propagation, simultaneously minimizing the anisotropic effects while maximizing the electromechanical properties of this cut of LN. The goal is to offer a piezoelectric material suitable for acoustofluidics applications that require greater flexibility in wave generation and propagation than the currently ubiquitous 128 Y -rotated X -propagating cut. The 128YX LN cut is known to most effectively generate Rayleigh SAW along the x -direction alone. Any SAW veering from this propagation direction is affected by beam steering and changes in resonance frequency and electromechanical coupling coefficients, consequently limiting the use of LN in various acoustofluidics applications, where more diverse configurations would be beneficial. The L -norm of these properties was evaluated under rotational transformation to produce a physical model with closed governing equations for 40-MHz surface wave propagation on the surface of a piezoelectric material. This was then utilized to obtain the surface wave velocity and coupling coefficient of the specific Y -cut LN with respect to the propagating direction. Next, the averaged coupling coefficients of various Y -cuts of LN in all propagating directions were calculated and integrated to simultaneously minimize anisotropy and maximize the electromechanical properties of the LN substrate. A 152 Y -rotated cut was found to be the optimal choice under these constraints, enabling multidirectional SAW propagation with greater coupling and lower variation in wave performance for SAW generated across the surface in any direction. Compared with the 128YX LN cut, this cut provides a 66.5% improvement in the in-plane isotropy and a 37.0% improvement in the average electromechanical coupling for in-plane SAW propagation. Experimental devices operating at the frequency of 40 MHz were designed, fabricated, and tested on the surface of this 500- [Formula: see text]-thick specific cut of LN and served to verify the supporting analysis and the superior isotropic properties of the 152 Y -rotated cut in generating SAW.

摘要

在此,我们提出一种用于多向表面声波(SAW)传播的优化Y轴旋转切割的铌酸锂(LN),同时将各向异性效应降至最低,同时使这种切割的LN的机电性能最大化。目标是提供一种适用于声流体应用的压电材料,该应用在波的产生和传播方面需要比目前普遍使用的128°Y轴旋转X向传播切割具有更大的灵活性。已知128°YX LN切割仅沿x方向最有效地产生瑞利表面声波。任何偏离此传播方向的表面声波都会受到波束转向以及共振频率和机电耦合系数变化的影响,从而限制了LN在各种声流体应用中的使用,而在这些应用中更多样化的配置会更有利。在旋转变换下评估这些特性的L范数,以生成一个具有封闭控制方程的物理模型,用于40 MHz表面波在压电材料表面的传播。然后利用该模型获得特定Y切割LN相对于传播方向的表面波速度和耦合系数。接下来,计算并积分LN各种Y切割在所有传播方向上的平均耦合系数,以同时最小化各向异性并最大化LN衬底的机电性能。发现在这些约束条件下,152°Y轴旋转切割是最佳选择,能够实现多向表面声波传播,对于在表面任何方向产生的表面声波具有更大的耦合和更低的波性能变化。与128°YX LN切割相比,这种切割在面内各向同性方面提高了66.5%,在面内表面声波传播的平均机电耦合方面提高了37.0%。设计、制造并在这种500 - [公式:见正文]厚的特定切割的LN表面上测试了工作频率为40 MHz的实验装置,以验证支持性分析以及152°Y轴旋转切割在产生表面声波方面的优异各向同性特性。

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