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基于梯度估计器的动态模式原子力显微镜振幅估计:小信号建模与调谐

Gradient Estimator-Based Amplitude Estimation for Dynamic Mode Atomic Force Microscopy: Small-Signal Modeling and Tuning.

作者信息

Ahmed Hafiz, Benbouzid Mohamed

机构信息

School of Mechanical, Aerospace and Automotive Engineering, The Futures Institute, Coventry University, Coventry CV1 2TL, UK.

Institut de Recherche Dupuy de Lôme (UMR CNRS 6027), University of Brest, 29238 Brest, France.

出版信息

Sensors (Basel). 2020 May 9;20(9):2703. doi: 10.3390/s20092703.

Abstract

Atomic force microscopy (AFM) plays an important role in nanoscale imaging application. AFM works by oscillating a microcantilever on the surface of the sample being scanned. In this process, estimating the amplitude of the cantilever deflection signal plays an important role in characterizing the topography of the surface. Existing approaches on this topic either have slow dynamic response e.g., lock-in-amplifier or high computational complexity e.g., Kalman filter. In this context, gradient estimator can be considered as a trade-off between fast dynamic response and high computational complexity. However, no constructive tuning rule is available in the literature for gradient estimator. In this paper, we consider small-signal modeling and tuning of gradient estimator. The proposed approach greatly simplifies the tuning procedure. Numerical simulation and experimental results are provided to demonstrate the suitability of the proposed tuning procedure.

摘要

原子力显微镜(AFM)在纳米级成像应用中发挥着重要作用。AFM通过在被扫描样品表面振荡微悬臂梁来工作。在此过程中,估计悬臂梁偏转信号的幅度对于表征表面形貌起着重要作用。关于这个主题的现有方法要么动态响应慢,例如锁相放大器,要么计算复杂度高,例如卡尔曼滤波器。在这种情况下,梯度估计器可被视为快速动态响应和高计算复杂度之间的一种折衷。然而,文献中没有针对梯度估计器的建设性调谐规则。在本文中,我们考虑梯度估计器的小信号建模和调谐。所提出的方法极大地简化了调谐过程。提供了数值模拟和实验结果来证明所提出调谐过程的适用性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7b94/7249209/c5f7f6eaf137/sensors-20-02703-g001.jpg

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