Weber Ksenia, Wang Zhen, Thiele Simon, Herkommer Alois, Giessen Harald
Opt Lett. 2020 May 15;45(10):2784-2787. doi: 10.1364/OL.392253.
In this Letter, we present a 3D-printed complex wide-angle multi-element Hypergon micro-objective, composed of aspherical lenses smaller than 1 mm, which exhibits distortion-free imaging performance. The objective is fabricated by a multi-step femtosecond two-photon lithography process. To realize the design, we apply a novel (to the best of our knowledge) approach using shadow evaporation to create highly non-transparent aperture stops, which are crucial components in many optical systems. We achieve a field-of-view (FOV) of 70°, at a resolution of 12.4 µm, and distortion-free imaging over the entire FOV. In the future, such objectives can be directly printed onto complementary metal-oxide-semiconductor (CMOS) imaging chips to produce extremely compact, high-quality image sensors to yield integrated sensor devices used in industry.
在本信函中，我们展示了一种3D打印的复杂广角多元件双曲线微物镜，它由小于1毫米的非球面透镜组成，具有无畸变成像性能。该物镜通过多步飞秒双光子光刻工艺制造。为实现该设计，我们采用了一种新颖的（据我们所知）方法，即利用阴影蒸发来制造高度不透明的孔径光阑，这是许多光学系统中的关键部件。我们实现了70°的视场（FOV），分辨率为12.4 µm，并且在整个视场内实现了无畸变成像。未来，这种物镜可直接打印在互补金属氧化物半导体（CMOS）成像芯片上，以生产极其紧凑的高质量图像传感器，从而制造出工业中使用的集成传感器设备。
