Jaffal A, Regreny P, Patriarche G, Chauvin N, Gendry M
Institut des Nanotechnologies des Lyon-INL, UMR 5270 CNRS, INSA de Lyon, Université de Lyon, 7 avenue Jean Capelle, 69621, Villeurbanne cedex, France. Institut des Nanotechnologies des Lyon-INL, UMR 5270 CNRS, Ecole Centrale de Lyon, Université de Lyon, 36 avenue Guy de Collongue, 69134, Ecully cedex, France.
Nanotechnology. 2020 Aug 28;31(35):354003. doi: 10.1088/1361-6528/ab9475. Epub 2020 May 19.
A procedure to achieve the density-controlled growth of gold-catalyzed InP nanowires (NWs) on (111) silicon substrates using the vapor-liquid-solid method by molecular beam epitaxy is reported. We develop an effective and mask-free method based on controlling the number and the size of the Au-In catalyst droplets in addition to the conditions for the NW nucleation. We show that the NW density can be tuned with values in the range of 18 µm to <0.1 µm by the suitable choice of the In/Au catalyst beam equivalent pressure (BEP) ratio, by the phosphorous BEP and the growth temperature. The same degree of control is transferred to InAs/InP quantum dot-nanowires, taking advantage of the ultra-low density to study by micro-photoluminescence the optical properties of a single quantum dot-nanowires emitting in the telecom band monolithically grown on silicon. Optical spectroscopy at cryogenic temperature successfully confirmed the relevance of our method to excite single InAs quantum dots on the as-grown sample, which opens the path for large-scale applications based on single quantum dot-nanowire devices integrated on silicon. .
报道了一种通过分子束外延采用气-液-固方法在(111)硅衬底上实现金催化的磷化铟纳米线(NWs)密度可控生长的工艺。除了NW成核条件外,我们还开发了一种基于控制金-铟催化剂液滴数量和尺寸的有效且无掩膜的方法。我们表明,通过适当选择铟/金催化剂束等效压力(BEP)比、磷BEP和生长温度,NW密度可在18 µm至<0.1 µm范围内进行调节。利用超低密度通过微光致发光研究在硅上单片生长的电信波段发射的单个量子点-纳米线的光学特性,相同程度的控制也适用于砷化铟/磷化铟量子点-纳米线。低温下的光谱学成功证实了我们的方法对于激发生长态样品上单个砷化铟量子点的相关性,这为基于集成在硅上的单个量子点-纳米线器件的大规模应用开辟了道路。