基于光片的显微镜用于表面形貌测量和定量分析。

Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis.

机构信息

Centre for Optical and Electromagnetic Research, National Engineering Research Center for Optical Instruments, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China.

School of Biomedical Engineering, Hainan University, Haikou 570228, China.

出版信息

Sensors (Basel). 2020 May 16;20(10):2842. doi: 10.3390/s20102842.

DOI:10.3390/s20102842

PMID:32429437

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7288151/

Abstract

A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 μm in -direction, 10 μm in -direction and 25 μm in -direction with a large field-of-view (FOV) is achieved. A set of sample measurements that verify the system's functionality in various applications are presented. The system has a simple mechanical structure, such that the spatial resolution is easily improved by replacement of the objective, and a linear calibration formula, which enables convenient system calibration. As implemented, the system has strong potential for, e.g., industrial sample line inspections, however, since the method utilizes reflected/scattered light, it also has the potential for three-dimensional analysis of translucent and layered structures.

摘要

讨论了一种新型的明场显微镜（LSM）系统，该系统使用激光三角测量法来定量计算和分析不透明样品的表面形貌。在 - 方向上的空间分辨率至少为 10 μm，在 - 方向上的空间分辨率为 10 μm，在 - 方向上的空间分辨率为 25 μm，具有大的视场（FOV）。提出了一组用于验证系统在各种应用中的功能的样品测量。该系统具有简单的机械结构，因此通过更换物镜很容易提高空间分辨率，并且具有线性校准公式，从而可以方便地进行系统校准。如实施例所示，该系统具有例如工业样品生产线检查的强大潜力，但是，由于该方法利用反射/散射光，因此它也具有对半透明和分层结构进行三维分析的潜力。