Ricciardella Filiberto, Vollebregt Sten, Polichetti Tiziana, Sarro Pasqualina M, Duesberg Georg S
Department of Microelectronics, Delft University of Technology, 2628 CT Delft, The Netherlands.
Institute of Physics, Universität der Bundeswehr München, 85577 Neubiberg, Germany.
Sensors (Basel). 2020 Jun 3;20(11):3174. doi: 10.3390/s20113174.
Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of multi-layered graphene (MLG) upon exposure to different levels of relative humidity. We synthesize MLG by chemical vapor deposition, as shown by Raman spectroscopy, Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Through an MLG-based resistor, we show that MLG is scarcely sensitive to humidity in the range 30%-70%, determining current variations in the range of 0.005%/%relative humidity (RH) well below the variation induced by other analytes. These findings, due to the morphological properties of MLG, suggest that defective MLG is the ideal sensing material to implement in gas sensors operating both at room temperature and humid conditions.
湿度传感在某些应用中至关重要，因为在环境条件下，湿度可能会对分析物的检测产生强烈干扰。理想情况下，在第一种或第二种情况下使用的传感器，分别强烈需要对湿度敏感或不敏感的材料。我们在此展示了多层石墨烯（MLG）在暴露于不同相对湿度水平时的传感特性。我们通过化学气相沉积法合成了MLG，拉曼光谱、原子力显微镜（AFM）和扫描电子显微镜（SEM）结果表明了这一点。通过基于MLG的电阻器，我们表明MLG在30% - 70%的湿度范围内对湿度几乎不敏感，确定电流变化范围为0.005% / %相对湿度（RH），远低于其他分析物引起的变化。由于MLG的形态特性，这些发现表明有缺陷的MLG是在室温和潮湿条件下运行的气体传感器中理想的传感材料。
