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通过拉曼光谱法测定各向异性范德华晶体的厚度:以黑磷为例。

Thickness determination of anisotropic van der Waals crystals by raman spectroscopy: the case of black phosphorus.

作者信息

Faraone Gabriele, Balduzzi Emanuele, Martella Christian, Grazianetti Carlo, Molle Alessandro, Bonera Emiliano

机构信息

L-NESS and Dipartimento di Scienza dei Materiali, Università di Milano-Bicocca, Via Cozzi 53, I-20125, Milano, Italy. CNR-IMM, Unità di Agrate Brianza, via C. Olivetti 2, Agrate Brianza, I-20864, Italy.

出版信息

Nanotechnology. 2020 Oct 9;31(41):415703. doi: 10.1088/1361-6528/ab9d3f. Epub 2020 Jun 16.

DOI:10.1088/1361-6528/ab9d3f
PMID:32544892
Abstract

The large foreseeable use two-dimensional materials in nanotechnology consequently demands precise methods for their thickness measurements. Usually, having a quick and easy methodology is a key requisite for the inspection of the large number of flakes produced by exfoliation methods. An effective option in this respect relies on the measurement of the intensity of Raman spectra, which can be used even when the flakes are encapsulated by a transparent protective layer. However, when using this methodology, special attention should be paid to the crystalline anisotropy of the examined material. Specifically, for the case of black phosphorus flakes, the absolute experimental determination of the thickness is rather difficult because the material is characterized by a low symmetry and also because the Raman tensors are complex quantities. In this work, we exploited Raman spectroscopy to measure the thickness of black phosphorous flakes using silicon as reference material for intensity calibrations. We found out that we can determine the thickness of a flake above 5 nm with an accuracy of about 20%. We tested the reproducibility of the method on two different setups, finding similar results. The method can be applied also to other van der Waals materials with a Raman band characterized by the same Raman tensor.

摘要

纳米技术中二维材料的大量可预见应用因此需要精确的厚度测量方法。通常,拥有一种快速简便的方法是检测通过剥落法产生的大量薄片的关键要求。在这方面,一个有效的选择依赖于拉曼光谱强度的测量,即使薄片被透明保护层包裹时也可以使用。然而,使用这种方法时,应特别注意被检测材料的晶体各向异性。具体而言,对于黑磷薄片的情况,厚度的绝对实验测定相当困难,这是因为该材料具有低对称性,并且拉曼张量是复杂的量。在这项工作中,我们利用拉曼光谱法以硅作为强度校准的参考材料来测量黑磷薄片的厚度。我们发现我们能够以约20%的精度确定厚度大于5nm的薄片的厚度。我们在两种不同的装置上测试了该方法的可重复性,得到了相似的结果。该方法也可以应用于具有相同拉曼张量特征的拉曼带的其他范德华材料。

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引用本文的文献

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Optical Inspection of 2D Materials: From Mechanical Exfoliation to Wafer-Scale Growth and Beyond.二维材料的光学检测:从机械剥离到晶圆级生长及其他
Adv Sci (Weinh). 2022 Jan;9(1):e2102128. doi: 10.1002/advs.202102128. Epub 2021 Oct 29.
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Probing the Laser Ablation of Black Phosphorus by Raman Spectroscopy.通过拉曼光谱探究黑磷的激光烧蚀
J Phys Chem C Nanomater Interfaces. 2021 Apr 29;125(16):8704-8711. doi: 10.1021/acs.jpcc.1c01443. Epub 2021 Apr 21.