Lee Yang-Chun, Chang Sih-Wei, Chen Shu-Hsien, Chen Shau-Liang, Chen Hsuen-Li
Department of Materials Science and Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei, 10617, Taiwan.
Adv Sci (Weinh). 2022 Jan;9(1):e2102128. doi: 10.1002/advs.202102128. Epub 2021 Oct 29.
Optical inspection is a rapid and non-destructive method for characterizing the properties of two-dimensional (2D) materials. With the aid of optical inspection, in situ and scalable monitoring of the properties of 2D materials can be implemented industrially to advance the development and progress of 2D material-based devices toward mass production. This review discusses the optical inspection techniques that are available to characterize various 2D materials, including graphene, transition metal dichalcogenides (TMDCs), hexagonal boron nitride (h-BN), group-III monochalcogenides, black phosphorus (BP), and group-IV monochalcogenides. First, the authors provide an introduction to these 2D materials and the processes commonly used for their fabrication. Then they review several of the important structural properties of 2D materials, and discuss how to characterize them using appropriate optical inspection tools. The authors also describe the challenges and opportunities faced when applying optical inspection to recently developed 2D materials, from mechanically exfoliated to wafer-scale-grown 2D materials. Most importantly, the authors summarize the techniques available for largely and precisely enhancing the optical signals from 2D materials. This comprehensive review of the current status and perspective of future trends for optical inspection of the structural properties of 2D materials will facilitate the development of next-generation 2D material-based devices.
光学检测是一种用于表征二维（2D）材料特性的快速且无损的方法。借助光学检测，二维材料特性的原位和可扩展监测能够在工业上得以实现，从而推动基于二维材料的器件朝着大规模生产的方向发展和进步。本综述讨论了可用于表征各种二维材料的光学检测技术，包括石墨烯、过渡金属二硫属化物（TMDCs）、六方氮化硼（h-BN）、III族单硫属化物、黑磷（BP）和IV族单硫属化物。首先，作者介绍了这些二维材料及其常用的制备工艺。然后，他们回顾了二维材料的几个重要结构特性，并讨论了如何使用合适的光学检测工具对其进行表征。作者还描述了将光学检测应用于最近开发的二维材料（从机械剥离到晶圆级生长的二维材料）时所面临的挑战和机遇。最重要的是，作者总结了可用于大幅精确增强二维材料光学信号的技术。这篇对二维材料结构特性光学检测的现状和未来趋势展望的全面综述，将有助于下一代基于二维材料的器件的发展。
