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基于机器学习的高通量自主掠入射 X 射线衍射有机组合薄膜库测绘。

High-Throughput and Autonomous Grazing Incidence X-ray Diffraction Mapping of Organic Combinatorial Thin-Film Library Driven by Machine Learning.

机构信息

Department of Applied Chemistry, School of Engineering, Tohoku University, Sendai, Miyagi 980-8579, Japan.

Japan Synchrotron Radiation Research Institute (JASRI), SPring-8, Sayo, Hyogo 679-5198, Japan.

出版信息

ACS Comb Sci. 2020 Jul 13;22(7):348-355. doi: 10.1021/acscombsci.0c00037. Epub 2020 Jun 17.

Abstract

High-throughput X-ray diffraction (XRD) is one of the most indispensable techniques to accelerate materials research. However, the conventional XRD analysis with a large beam spot size may not best appropriate in a case for characterizing organic materials thin film libraries, in which various films prepared under different process conditions are integrated on a single substrate. Here, we demonstrate that high-resolution grazing incident XRD mapping analysis is useful for this purpose: A 2-dimensional organic combinatorial thin film library with the composition and growth temperature varied along the two orthogonal axes was successfully analyzed by using synchrotron microbeam X-ray. Moreover, we show that the time-consuming mapping process is accelerated with the aid of a machine learning technique termed as Bayesian optimization based on Gaussian process regression.

摘要

高通量 X 射线衍射(XRD)是加速材料研究最不可或缺的技术之一。然而,在对各种不同工艺条件下制备的薄膜集成在同一衬底上的有机材料薄膜库进行特性分析时,大光斑尺寸的传统 XRD 分析可能并不适用。在这里,我们证明高分辨率掠入射 XRD 绘图分析在这方面很有用:使用同步微束 X 射线成功地对组成和沿两个正交轴的生长温度变化的二维有机组合薄膜库进行了分析。此外,我们还表明,借助基于高斯过程回归的贝叶斯优化这一机器学习技术,可以加速耗时的绘图过程。

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